Shaolin Zhou
South China University of Technology
47 Papers
54 Citations
Shaolin Zhou is an academic researcher from South China University of Technology. The author has contributed to research in topics: Lithography & Grating. The author has an hindex of 10, co-authored 41 publications. Previous affiliations of Shaolin Zhou include Chinese Academy of Sciences & Hong Kong University of Science and Technology.
Chat about Author
Papers
Initiator-Integrated 3D Printing Enables the Formation of Complex Metallic Architectures
TL;DR: Three-dimensional printing was used to fabricate various metallic structures by directly integrating a Br-containing vinyl-terminated initiator into the 3D resin followed by surface-initiated atomic-transfer radical polymerization (ATRP) and subsequent electroless plating.
Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography.
TL;DR: The computational analyses results show that the moiré fringes of the two extended gratings can be refined as a transformed fringe pattern of two standard 1D-gratings and are highly sensitive to relative shift of two gratings thus might be applicable in alignment of lithography or correlated fields.
74
SU-8-Induced Strong Bonding of Polymer Ligands to Flexible Substrates via in Situ Cross-Linked Reaction for Improved Surface Metallization and Fast Fabrication of High-Quality Flexible Circuits
TL;DR: A simple universal one-step solution-based coating method for fast surface modification of various objects through which a layer of P4VP molecules with controllable thickness can be tethered tightly onto substrates with the assistance of SU-8.
44
Tilt-modulated spatial phase imaging method for wafer-mask leveling in proximity lithography.
TL;DR: A tilt-modulated phase imaging method to adjust the gap inconsistency for wafer-mask leveling in proximity lithography and results confirm that tilts at the magnitude of 10(-3) rad can be readily resolved by this method.
34
Four-quadrant gratings moiré fringe alignment measurement in proximity lithography
Jiangping Zhu,Song Hu,Junsheng Yu,Shaolin Zhou,Yan Tang,Min Zhong,Lixin Zhao,Minyong Chen,Lanlan Li,Yu He,Wei Jiang +10 more
TL;DR: A four-quadrant gratings alignment method benefiting from phase demodulation for proximity lithography, which combines the advantages of interferometry with image processing, which enhances the technological adaptability.
31