https://hal.archives-ouvertes.fr/hal-01357931/document

Nonlinear normal modes, Part I: A useful framework for the structural dynamicist

This review provides a summary of the work completed to date on the nonlinear dynamics of resonant micro- and nanoelectromechanical systems (MEMS/NEMS). This research area, which has been active for approximately a decade, involves the study of nonlinear behaviors arising in small scale, vibratory, mechanical devices that are typically integrated with electronics for use in signal processing, actuation, and sensing applications. The inherent nature of these devices, which includes low damping, desired resonant operation, and the presence of nonlinear potential fields, sets an ideal stage for the appearance of nonlinear behavior, and this allows engineers to beneficially leverage nonlinear dynamics in the course of device design. This work provides an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, such as localization and synchronization, which arise in coupled resonator arrays. In addition, the work describes the active exploitation of nonlinear dynamics in the development of resonant mass sensors, inertial sensors, and electromechanical signal processing systems. The paper closes with some brief remarks about important ongoing developments in the field.

/pdf/nonlinear-dynamics-and-its-applications-in-micro-and-2d8rp19sh4.pdf

Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators

A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the coupled electromechanical fluid–structure interaction problem are outlined. Simplified reduced-order models are illustrated along with assumptions that define their range of applicability. Theoretical, numerical and experimental works are classified according to the mechanical model used in the analysis.

https://iopscience.iop.org/article/10.1088/0964-1726/16/6/R01/pdf

Review of modeling electrostatically actuated microelectromechanical systems

Vibrations of narrow microbeams predeformed by an electric field

The aim of the current study is to examine the in-plane and out-of-plane nonlinear size-dependent dynamics of a microplate resting on an elastic foundation, constrained by distributed rotational springs at boundaries. Employing the von Karman plate theory as well as Kirchhoff’s hypotheses, the equations of motion for the in-plane and out-of-plane directions are derived by means of the Lagrange equations, based on the modified couple stress theory. The potential energies stored in a Winkler-type elastic foundation and the rotational springs at the edges of the microplate are taken into account. The set of second-order nonlinear ordinary differential equations, obtained via the Lagrange scheme, is recast into a double-dimensional set of first-order nonlinear ordinary differential equations with coupled terms by means of a change of variables. The linear natural frequencies of the system are obtained through use of an eigenvalue analysis upon the linear terms of the equations of motion. The nonlinear response, on the other hand, is obtained by means of the pseudo-arclength continuation method. The dynamical characteristics of the system are examined via plotting the frequency–response and force–response curves. The effect of the stiffness of the rotational and translational springs on the nonlinear size-dependent behaviour is also examined. Finally, the effect of employing the modified couple stress theory, rather than the classical theory, on the response is discussed.

In-plane and out-of-plane nonlinear size-dependent dynamics of microplates

A nonlinear modal analysis approach based on the invariant manifoldmethod proposed earlier by Boivin et al. [10] is applied in this paperto perform the dynamic analysis of a micro switch. The micro switch ismodeled as a clamped-clamped microbeam subjected to a transverseelectrostatic force. Two kinds of nonlinearities are encountered in thenonlinear system: geometric nonlinearity of the microbeam associatedwith large deflection, and nonlinear coupling between two energydomains. Using Galerkin method, the nonlinear partial differentialgoverning equation is decoupled into a set of nonlinear ordinarydifferential equations. Based on the invariant manifold method, theassociated nonlinear modal shapes, and modal motion governing equationsare obtained. The equation of motion restricted to these manifolds,which provide the dynamics of the associated normal modes, are solved bythe approach of nonlinear normal forms. Nonlinearities and the pull-inphenomena are examined. The numerical results are compared with thoseobtained from the finite difference method. The estimate for the pull-involtage of the micro device is also presented.

Nonlinear Dynamic Analysis of MEMS Switches by Nonlinear Modal Analysis

Handle everyday research tasks with reliable, citation-backed results

Your personal Research Agent to handle research tasks with citation-backed results

Popular Tasks used by Researchers

How can I help with your research?

Meet SciSpace

Get more enhanced response by uploading the PDFs you want me to reference.

No relevant PDFs in your library

SciSpace is the AI research assistant for academics. Run systematic literature reviews on 280M+ papers, and write papers with cited sources. Trusted by 1M+ students, PhDs & researchers.

SciSpace | AI for Research

Analyze PDFs

Code & Manuscripts

Funding & Grants

Literature & Patents

Medical & Clinical Data

Systematic Review

Visualize & Present

Web & Data

Build a Google Scholar-like website for your research.

Build a website

Create charts and images for your research

Create a Chart

Write a paper for submission to a journal

Draft a manuscript

Patent Search

Design eye-catching scientific posters in minutes.

Scientific Poster Generation

Systematic Literature Review

One task is running at the moment. Your messages will be shown right after.

Drag and drop or click here to browse

Loved by <highlight>1 million+</highlight> researchers

Extract a list of specific topics and their sources from unstructured text

Topics

Compare and analyze relevant papers that matches with your search

Papers

Get insights from PDFs and bookmarked papers from your library

My library

Recent searches

Try searching for:

Catch AI-generated content in scholarly and non-scholarly content

{ai} Detector

Ai Writer

Get PDF Summaries, highlighted text explanations 

Chat with PDF

Effortlessly create in-text citations and bibliographies in APA and 2,500 other formats

Citation generator

Get explanations, summaries, and answers on academic papers

Ease up your research workflow with {scispace}'s cohort of exciting AI tools

Elevate your academic writing skills and convey your ideas the way you want

Paraphraser

Explore our range of reading and writing tools

Your file is being prepared and should be ready in a few minutes. If it's a large file, it might take a bit longer. You can close this window, and we'll email you the file when it's done.

You have reached a maximum limit of <strong>{limit}</strong> columns in the table. Remove at least <strong>1</strong> column to add or create another one.

S. P. Lim

Author Tools

Chat about Author

Papers

Nonlinear Dynamic Analysis of MEMS Switches by Nonlinear Modal Analysis