S. Jorez
Université catholique de Louvain
4 Papers
35 Citations
S. Jorez is an academic researcher from Université catholique de Louvain. The author has contributed to research in topics: Silicon on insulator & Etching (microfabrication). The author has an hindex of 3, co-authored 4 publications.
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Papers
Thin films stress extraction using micromachined structures and wafer curvature measurements
J. Laconte,François Iker,S. Jorez,Nicolas André,Joris Proost,Thomas Pardoen,Denis Flandre,Jean-Pierre Raskin +7 more
TL;DR: In this paper, the internal stresses present in thin dielectric films are studied for mono and multi-layers composed of thermal oxide, LPCVD nitride and densified PECVD oxide.
88
Low-cost optical instrumentation for thermal characterization of MEMS
TL;DR: In this article, a low-cost, non-destructive and flexible technique based on thermoreflectometry is presented to map the temperature of running devices integrated on a silicon chip.
24
MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements
TL;DR: In this paper, a white light interferometer can be used to measure profiles of a few nanometers and is therefore particularly well adapted for micro electro mechanical systems characterization, and theoretical and experimental results on the profile precision as a function of the light source spectrum.
9
CMOS compatible 3D flow and thermal sensors in SOI technology
Nicolas André,François Iker,S. Jorez,J-P Raskin +3 more
- 31 Oct 2005
TL;DR: In this article, the authors presented interdigitated capacitors for flow and thermal sensing and circular-shaped bolometers for thermal applications, both based on a one-mask CMOS compatible silicon-on-insulator (SOI) process.
2