R. Souil
University of Grenoble
5 Papers
4 Citations
R. Souil is an academic researcher from University of Grenoble. The author has contributed to research in topics: Wafer & Superconducting quantum computing. The author has an hindex of 1, co-authored 1 publications.
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Papers
Transmission measurements of multilayer interference filters developed for a full integration on Complementary Metal Oxide Semiconductor chips
Lilian Masarotto,Laurent Frey,M.L. Charles,A. Roule,Guillaume Rodriguez,R. Souil,C. Morales,V. Larrey +7 more
TL;DR: In this article, a method to measure the transmission spectra of optical filters composed of complementary metal-oxide-semiconductor (CMOS) compatible materials thin layers in order to be fully integrated on various types of CMOS image sensors (ambient light sensors, proximity detection, red green blue colour imaging, etc.).
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Superconducting routing platform for control and read-out of spin qubits
Candice Thomas,Jean-Philippe Michel,E. Deschaseaux,Jean Charbonnier,R. Souil,Elisa Vermande,Alain Díaz Campo,T. Farjot,Guillaume Rodriguez,G. Romano,Frédéric Gustavo,Baptiste Jadot,Vivien Thiney,Yvain Thonnart,Gerard Billiot,Tristan Meunier,Maud Vinet +16 more
TL;DR: In this article , a routing level couples the qubits and the control circuits through one layer of Al0.995Cu0.005 and superconducting layers of TiN, Nb or NbN, connected between them by W-based vias.
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Chemical Mechanical Polishing of Superconducting Metals for Quantum Device Interconnections
Mohamed Rayane Bani,R. Crochemore,Florian Baudin,Cassandre Beluffi,C. Euvrard-Colnat,Sebastien Dominguez,Guillaume Rodriguez,R. Souil,R. Velard,Jean Charbonnier,E. Deschaseaux,Candice Thomas +11 more
- 13 Sep 2022
TL;DR: In this paper , the damascene integration of Nb-based vias with a focus on the chemical mechanical polishing of nb was investigated, and various slurries typically used for common metal or oxide polishing were evaluated using the following criteria: the removal rate of NB, the selectivity on SiO2 dielectrics, the polishing within wafer non uniformity and the resulting Nb roughnesses.
Towards the understanding of the Ti/Al ratio role in solid-state reaction for ohmic contacts on n-GaN
Sophie Guillemin,S. Messaoudene,Patrice Gergaud,Jérôme Biscarrat,P. Roulet,Nicolas Bernier,R. Templier,R. Souil,Xavier Zucchi,Ph. Rodriguez +9 more
TL;DR: In this article , the influence of the deposited Ti layer thickness on the resulting contact is investigated using in-situ and ex-Situ XRD methods as well as TEM imaging, and it is found that a threshold exists, below which the diffusion phenomena ruling alloy formation during annealing are controlled, leading to a frozen Al3Ti/Al bi-layer morphology.
Superconducting routing platform for large-scale integration of quantum technologies
Candice Thomas,Jean-Philippe Michel,E. Deschaseaux,Jean Charbonnier,R. Souil,Elisa Vermande,Alain Díaz Campo,T. Farjot,Guillaume Rodriguez,G. Romano,Frederico Gustavo,Baptiste Jadot,Vivien Thiney,Yvain Thonnart,Gerard Billiot,Tristan Meunier,Maud Vinet +16 more
TL;DR: In this paper , a routing level couples the qubits and the control circuits through one layer of Al0.995Cu0.005 and superconducting layers of TiN, Nb or NbN, connected between them by W-based vias.