R. Emling
Technische Universität München
15 Papers
164 Citations
R. Emling is an academic researcher from Technische Universität München. The author has contributed to research in topics: Field-effect transistor & Focused ion beam. The author has an hindex of 10, co-authored 15 publications.
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Papers
Stacked 3-dimensional 6T SRAM cell with independent double gate transistors
M. Weis,Andrzej Pfitzner,Dominik Kasprowicz,R. Emling,T. Fischer,Stephan Henzler,Wojciech Maly,Doris Schmitt-Landsiedel +7 more
- 18 May 2009
TL;DR: In this paper, a stacked three-dimensional six transistor SRAM cell using a novel vertical slit field effect transistor with two independently controlled gates is proposed and a compact stacked 3D memory cell topology with a highly regular layout is presented.
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Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects
L. Gao,J. Gstöttner,R. Emling,M. Balden,Ch. Linsmeier,A. Wiltner,Walter Hansch,Doris Schmitt-Landsiedel +7 more
TL;DR: In this article, the process development and characterization of titanium nitride (TiN) as a diffusion barrier for silver (Ag) metallizations were discussed, with sheet resistance measurement, X-ray diffraction (XRD), focused ion beam-scanning electron microscopy (FIB-SEM), atomic force microscope (AFM) and Xray photoelectron spectroscopy (XPS) compared to as-deposited multilayers.
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Silver metal organic chemical vapor deposition for advanced silver metallization
TL;DR: In this paper, various organometallic precursors (hfacAg(1,5-COD), (fod)Ag(PEt"3), and hfacAg-VTES) for the metal organic chemical vapor deposition (MOCVD) of silver on a TiN adhesion layer were evaluated and their deposition characteristics was studied.
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Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system
TL;DR: In this paper, a direct liquid injection-metal organic chemical vapor deposition (DLI-MOCVD) was used for the preparation of Ag CVD, which allows precise control of precursor flow and prevents early decomposition of the precursor as compared to the bubbler-delivery.
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