R.D. Lanam
Engelhard
1 Papers
R.D. Lanam is an academic researcher from Engelhard. The author has contributed to research in topics: Ohmic contact & Diffusion barrier. The author has co-authored 1 publications.
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Papers
Ruthenium Contacts Resist Chemical Attack in Communications Use
R.D. Lanam,A.R. Robertson +1 more
TL;DR: In general, sputtered ruthenium films attain platinum-group properties that make them candidates for various uses in electrical, thermal and decorative areas as discussed by the authors, and they could possibly be used as a diffusion barrier and adhesive layer.