Qingxin Zhang
Agency for Science, Technology and Research
29 Papers
196 Citations
Qingxin Zhang is an academic researcher from Agency for Science, Technology and Research. The author has contributed to research in topics: Diffraction grating & Grating. The author has an hindex of 9, co-authored 29 publications.
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Papers
A nanomachined optical logic gate driven by gradient optical force
TL;DR: In this paper, a nanomachined optical logic gate using optical gradient force is demonstrated, which consists of a partially free-hanging silicon double-ring resonator developed by the nano-electro-mechanical system technology.
A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride
Doris K. T. Ng,Tan-Tan Zhang,Li-Yan Siow,Linfang Xu,Chong Pei Ho,Hong Cai,Lennon Yao Ting Lee,Qingxin Zhang,Navab Singh +8 more
TL;DR: In this paper, a functional complementary metal-oxide-semiconductor (CMOS) compatible pyroelectric uncooled thermal detector using 12% doped Scandium Aluminum Nitride (ScAlN) as the sensing layer is presented.
Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors
Doris K. T. Ng,Guoqiang Wu,Tan-Tan Zhang,Linfang Xu,Jianbo Sun,Wing-Wai Chung,Hong Cai,Qingxin Zhang,Navab Singh +8 more
TL;DR: In this paper, the authors demonstrate a MEMS pyroelectric IR detector using CMOS compatible AlN and 8-inch semiconductor wafer technology, which is designed to have added mechanical stiffness for improved device integrity.
High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating
TL;DR: In this article, a microelectromechanical system (MEMS)-based sub-wavelength diffraction grating under in-plane motion for high-optical-efficiency high-speed laser-scanning applications is presented.
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A 2-DOF Circular-Resonator-Driven In-Plane Vibratory Grating Laser Scanner
TL;DR: In this paper, the design, modeling, fabrication, and measurement results of a microelectromechanical systems (MEMS)-based in-plane vibratory grating scanner driven by a two-degree-of-freedom (2-DOF) comb-driven circular resonator for high-speed laser scanning applications are presented.
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