Peter Schindler
Stanford University
23 Papers
172 Citations
Peter Schindler is an academic researcher from Stanford University. The author has contributed to research in topics: Atomic layer deposition & Thin film. The author has an hindex of 10, co-authored 22 publications. Previous affiliations of Peter Schindler include University of Vienna.
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Papers
Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
J. Provine,Peter Schindler,Yongmin Kim,Steve P. Walch,Hyo-Jin Kim,Ki-Hyun Kim,Fritz B. Prinz +6 more
TL;DR: In this paper, the authors report on the evaluation of multiple precursors for plasma enhanced atomic layer deposition (PEALD) of SiNx and evaluate the film's WER in 100:1 dilutions of HF in H2O.
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Next generation high-k dielectrics for DRAM produced by atomic layer deposition studied by transmission electron microscopy
Peter Schindler
- 01 Jan 2015
TL;DR: In this article, the authors show that the dielektrische Schicht is dunner wird, i.e., the Schicht of DRAM is not a wichtige komponente in the DRAM.
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Extending the limits of Pt/C catalysts with passivation-gas-incorporated atomic layer deposition
Shicheng Xu,Yongmin Kim,Joonsuk Park,Drew Higgins,Shih Jia Shen,Peter Schindler,Dickson Thian,J. Provine,Jan Torgersen,Jan Torgersen,Tanja Graf,Thomas D. Schladt,Marat Orazov,Bernard Haochih Liu,Thomas F. Jaramillo,Fritz B. Prinz,Fritz B. Prinz +16 more
- 01 Aug 2018
TL;DR: In this paper, carbon monoxide is used as a passivation gas during atomic layer deposition to modify the surface energy of already deposited Pt nanoparticles to assist direct deposition onto a carbon catalyst support.
Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
TL;DR: The limits of conformality in 1:30 AR structures for TiO2 based on tetrakis(dimethylamido)titanium (TDMA-Ti) and O2 plasma are studied through variation in plasma exposure and substrate temperature.
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Surface Photovoltage-Induced Ultralow Work Function Material for Thermionic Energy Converters.
Peter Schindler,Daniel Riley,Igor Bargatin,Kunal Sahasrabuddhe,Kunal Sahasrabuddhe,Kunal Sahasrabuddhe,Jared Schwede,Jared Schwede,Jared Schwede,Steven Sun,Piero Pianetta,Piero Pianetta,Zhi-Xun Shen,Zhi-Xun Shen,Zhi-Xun Shen,Roger T. Howe,Nicholas A. Melosh,Nicholas A. Melosh,Nicholas A. Melosh +18 more
TL;DR: A record-low work function of 0.70 eV is reported by inducing a surface photovoltage (SPV) in an n-type semiconductor with an alkali metal coating by applying the SPV to the collector of an experimental TEC and demonstrating an I–V curve shift consistent with the collector work function reduction.
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