Peter De Wolf
IMEC
16 Papers
210 Citations
Peter De Wolf is an academic researcher from IMEC. The author has contributed to research in topics: Scanning capacitance microscopy & Scanning probe microscopy. The author has an hindex of 7, co-authored 16 publications.
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Papers
Contrast reversal in scanning capacitance microscopy imaging
TL;DR: In this paper, the authors investigated the quantification properties of scanning capacitance microscopy (SCM) by using two dedicated test structures and highlight the response of SCM to changes in dopant density.
60
Patent
Method for measuring the electrical potential in a semiconductor element
Louis C. Hellemans,T. Trenkler,Peter De Wolf,Wilfried Vandervorst +3 more
- 02 Mar 1998
TL;DR: In this paper, a scanning proximity microscope was used to measure the electrical potential in a semiconductor element by applying one or more voltages over the semiconductor elements, placing at least one conductor in contact with the semi-conductor element, injecting a substantially zero current with the conductor, changing the position of the conductor and repeating the measuring and changing steps.
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Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
TL;DR: In this article, the effect of contrast reversal in scanning capacitance microscopy (SCM) imaging is discussed, taking into account the implications for samples which contain both p-type and n-type dopants.
28
Patent
Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope
Marc Meuris,Wilfried Vandervorst,Peter De Wolf +2 more
- 28 Nov 1994
TL;DR: In this paper, a method for measuring the resistance or conductivity between two or more conductors which are placed against a semiconductor element, the conductors are placed either in contact with the top surface or one conductor is placed in the form of a large ohmic contact applied to the bottom surface of the semiconductor elements.
22
Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization
Robert John Stephenson,Peter De Wolf,Thomas Trenkler,Thomas Hantschel,Trudo Clarysse,Philippe Jansen,Wilfried Vandervorst +6 more
TL;DR: In this paper, the authors have imaged several n-type metaloxide-semiconductor transistors with different source and drain architectures to assess the feasibility of extracting useful figures of merit, such as the effective channel length of a device, from the data.
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