A plasma processing method and apparatus are provided for processing the surface of a semiconductor device or the like through the effect of plasma A pulsed plasma discharge is performed by switching on and off the high frequency electric power for generating the plasma with a specified off period of the plasma generation, to control an inflow amount of positive and negative charges to sparse and dense portions of device patterns and suppress an electric potential on a gate oxide film Thereby, a highly accurate etching process with no charging damage can be carried out

Plasma processing method and apparatus

A plasma processing apparatus wherein a layer structure consisting of plural layers formed in stack one upon another on a semiconductor wafer placed on the sample holder located in the process chamber, is etched with plasma generated in the process chamber by supplying high frequency power to the electrode disposed in the sample holder, the apparatus comprising a ring-shaped electrode disposed above the electrode and around the periphery of the top portion of the sample holder, an outer circumferential ring of dielectric material disposed above the ring-shaped electrode and opposite to the plasma, and a power source for supplying power at different values to the ring-shaped electrode depending on the sorts of layers of the layer structure.

Plasma Processing Apparatus

A taillight system for an automotive vehicle has an optic manifold mounted in a assembly defining a light emitting area, a first light source configured to provide illumination through the light emitting area, and a second light source configured to provide illumination through a predetermined portion of the light emitting area. The system has an illumination mode in which the first light source provides illumination of a first intensity in a first wavelength range through the light emitting area, a brake mode in which the first light source provides illumination of a second intensity in the first wavelength range through the light emitting area, and a backup mode in which the second light source provides illumination in a second wavelength range through the predetermined portion of the light emitting area, with or without the first light source providing illumination through the light emitting area, the second wavelength range including the first wavelength range.

Multi-function vehicle taillight system with unitary optic

Apparatus and method for the vacuum deposition of at least two different layers of thin film material onto a substrate by two different vacuum deposition processes. Also disclosed is a novel linear applicator for using microwave enhanced CVD to uniformly deposit a thin film of material over an elongated substrate.

Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor

A vehicle lamp unit 1 in which a plurality of light emitting diodes 13 are arranged to make up a light source is disclosed. The lamp unit includes a base member 7 for supporting a plurality of the light emitting diodes, feeder wires 14 that are disposed at the reverse side of the base member and connected to lead terminals 13 d of the light emitting diodes, and feeder terminals 16 connected to the feeder wires. The lamp unit advantageously realizes a cost reduction, enhances the degree of design freedom, and promotes environmental protection.

Vehicle lamp unit

The lamp includes a low-profile housing which encloses a dozen generally aligned light sources (preferably LEDs) (20) spaced 25 mm apart on an elongated printed circuit board. Emission from each hemispherical end (22) is concentrated by a cylindro-parabolic reflector (40) through the Fresnel lens (50) on to an array of scattering spheres or toroids (61) on the inside of a U-section moulding (60). The body (21) of each source is wider than the emissive hemisphere on to which the reflector and facets (51) of the Fresnel lens are focused. The hemisphere emits into a cone with a semi-vertical angle (θ ) of about 50 degrees , while the reflector restricts the angle of emission (phi) to 30-40 degrees .

Signal light with several light sources arranged in line, especially complementary brake light for vehicle

An indicator unit for a motor vehicle, in particular a so-called complementary rear stop light displaying a narrow strip of light, has a plurality of light sources aligned with each other in an elongate narrow housing. Each light source emits light in a given emission field. The unit includes optical means for redirecting the light emitted by the sources in a general emission direction, and an optic having optical elements for diffusing the output light of the unit. The redirecting means comprise lenses focussed in the vicinity of the respective light sources and directly exposed to the radiation emitted by the respective sources in a central part of their emission field, together with a cylindrical mirror which reflects towards the lenses the light emitted by the sources in at least an edge portion of their emission field.

Indicating light, in particular a complementary stop light for a motor vehicle, having a number of light sources in line with each other

The invention relates to a device for polymer deposition under vacuum in vapour phase by means of a plasma excited by microwaves, on surfaces (110, 210) of a plurality of elements (100), especially aluminised internal surfaces of vehicle lamp reflectors, comprises a deposition enclosure (10), means for establishing a hard vacuum in the said enclosure, microwave excitation means comprising a microwave generator (20) and means (6) for applying the microwaves in the enclosure by means of at least one window (32) which is leaktight to the gas and transparent with respect to the microwaves, and at least one monomer gas diffuser (40) arranged in the deposition enclosure in proximity to each window. According to the invention, the said microwave application means include at least one waveguide (30) situated outside the enclosure and comprising a microwave inlet aperture, one generally planar wall of which (31), turned towards the said window, includes a plurality of radiating slots. Application to the production of a protective deposition on the inner aluminised surfaces of motor vehicles headlamp reflectors.

Device for coating polymer with a microwave excited plasma

Signalleuchte mit mehreren in Reihe angeordneten Lichtquellen, insbesondere komplementäre Bremsleuchte für Kraftfahrzeuge

Dispositif pour le dépôt de polymère par l'intermédiaire d'un plasma excité par micro-ondes.

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