Okuda Hiroshi
1 Papers
1 Citations
Okuda Hiroshi is an academic researcher. The author has contributed to research in topics: Humidity & Substrate (electronics). The author has an hindex of 1, co-authored 1 publications.
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Papers
Patent
Humidity sensor and its manufacturing method
Okuda Hiroshi
- 27 Mar 2002
TL;DR: In this article, a humidity sensor S is constituted by forming a lower electrode film 2 on a substrate 1, forming a humidity sensing film 3 of ferroelectric substance on the lower electrode network, and forming an upper electrode film 4 on the humidity sensing network.
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