Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.

Substrate Processing Apparatus

A resistance change memory device includes: a memory cell array with memory cells arranged therein, the memory cell having a variable resistance element for storing a rewritable resistance value; a reference cell formed of the same memory cells as those set in a high resistance state in the memory cell array, the reference cell being trimmed with selection of the number of parallel-connected memory cells to have a reference current value used for detecting data in the memory cell array; and a sense amplifier configured to compare a cell current value of a memory cell selected in the memory cell array with the reference current value of the reference cell.

Resistance change memory device

With the addition of directional information and gesture based input in a location based services environment, a variety of service(s) can be provided on top of user identification or interaction with specific object(s) of interest. For instance, when a user gestures at or points at a particular item, or gestures at a particular location or place, this creates an opportunity, e.g., an advertising opportunity, for anyone having an interest in that particular item or place to communicate with the user regarding that item or related items at a point in time when the user's focus is on the particular item. User context for the interaction can also be taken into account to supplement the provision of one or more interactive direction based services.

Data services based on gesture and location information of device

A group of devices are fabricated based on a common design, each device having a corresponding plurality of measurable characteristics that is unique in the group to that device, each device having a measurement module for measuring the measurable characteristics. Authentication of one of the group of devices is enabled by selective measurement of one or more of the plurality of measurable characteristics of the device.

Authentication of integrated circuits

Physical Unclonable Functions (PUFs) for authentication can be implemented in a variety of electronic devices including FPGAs, RFIDs, and ASICs. In some implementations, challenge-response pairs corresponding to individual PUFs can be enrolled and used to determine authentication data, which may be managed in a database. Later when a target object with a PUF is intended to be authenticated a set (or subset) of challenges are applied to each PUF device to authenticate it and thus distinguish it from others. In some examples, authentication is achieved without requiring complex cryptography circuitry implemented on the device. Furthermore, an authentication station does not necessarily have to be in communication with an authority holding the authentication data when a particular device is to be authenticated.

Authentication with physical unclonable functions

PROBLEM TO BE SOLVED: To provide a semiconductor memory device that is versatile enough for a selection of uses matching users' needs and can maintain high speed access even with increased capacity. SOLUTION: The semiconductor memory device 1A does not have any backup internal power supplies and memory backup devices thereon but has an expansion I/F 17A connectable with external devices for data backup and memory extension. An internal bus is an optical bus, and an optical branch transmission part 13A forms a wiring branch between an internal semiconductor memory 15 and the expansion I/F 17A. COPYRIGHT: (C)2008,JPO&INPIT

Semiconductor memory device

According to the present invention, piracy of secret data is prevented without an attack detecting circuit or data deleting circuit. In a secret data processing unit, a cell contains fluid in a sealed space. Code generators arranged in the sealed space receive a code generation request to generate codes specified by the pressure value of the fluid. A key generator disposed in the sealed space generates encryption keys/decryption keys specified by the generated codes. An encryptor/decryptor also disposed in the sealed space receives requests for secret data encryption/requests for encrypted secret data decryption, and outputs code generation requests to the code generator to encrypt the secret data/decrypt the encrypted secret data by using the generated encryption key/decryption key. Both codes and encryption keys/decryption keys generated and used, are not statically stored in the cryptographic processing unit.

Physical property based cryptographics

To improve resistance to environmental changes and enhance system extensibility, the present invention provides an optical bus for transmitting an optical signal, which has diffusers distributed in a optical transmission layer to diffuse an input signal beam and propagate the diffused signal beam, and a signal processor for carrying out signal processing including transmission and reception of a signal beam using the optical bus.

Optical bus and signal processor

A signal transmission bus comprising a plurality of optical transmission layers and optical isolation layers stacked alternately. Each of the optical transmission layers has signal light input thereinto and propagating the input signal light diffusedly. Each of the optical isolation layers prevents the mixing of the signal light between any two adjacent optical transmission layers. At least one of the optical isolation layers comprises electrical wiring for transmitting electrical signals.

Signal transmission bus and signal processing apparatus

PROBLEM TO BE SOLVED: To provide a semiconductor storage device securing integrity of data without stopping storage function even when a failure occurs in an optical transmission path SOLUTION: Data from a host apparatus 3 is converted to an optical signal in an electrical-optical conversion part 12 This optical signal is optically transmitted through optical fiber 121, sheet like optical wave guide path 13 and optical fibers 131A to 131D, and is stored in memories 16A to 16D by memory controllers 15A to 15D after being returned to an electrical signal in optical-electrical conversion parts 14A to 14D For example, when disconnection, etc, occurs in the optical fiber 131B in an optical memory bus 19, an occurrence of the failure is notified to a main controller 10 from the optical-electrical conversion part 14B The main controller 10 uses a control line 101 as the bus and the data read from a memory 10a is stored to the memory 16B through the control line 101 and the data in the memories 16A to 16D are stored in a storage 17 for backup COPYRIGHT: (C)2008,JPO&INPIT

Semiconductor storage device

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