Norbert Lang
Leibniz Association
46 Papers
278 Citations
Norbert Lang is an academic researcher from Leibniz Association. The author has contributed to research in topics: Quantum cascade laser & Absorption spectroscopy. The author has an hindex of 13, co-authored 44 publications.
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Papers
Applications of quantum cascade lasers in plasma diagnostics: a review
TL;DR: In this paper, the authors review spectroscopic issues arising from applying pulsed QCLs, report on recent achievements in understanding of molecular phenomena in plasmas and at surfaces, and describe the current status of industrial process monitoring in the mid-infrared and discuss the potential of advanced instrumentation based on EC-QCLs for plasma diagnostics.
205
Sensitive trace gas detection with cavity enhanced absorption spectroscopy using a continuous wave external-cavity quantum cascade laser
TL;DR: In this article, the performance of a simple cavity enhanced absorption spectroscopy (CEAS) sensor using a continuous wave external-cavity QCL at 7.4 µm was reported.
63
In Situ Monitoring of Silicon Plasma Etching Using a Quantum Cascade Laser Arrangement
TL;DR: In this article, concentrations of the precursor gas NF3 and of the etch product SiF4 are measured online and in situ using a new diagnostic arrangement, the Q-MACS Etch system, which is based on quantum cascade laser absorption spectroscopy (QCLAS).
43
On determination of the degree of dissociation of hydrogen in non-equilibrium plasmas by means of emission spectroscopy: II. Experimental verification
TL;DR: In this paper, the degree of dissociation of hydrogen in non-equilibrium plasma was verified under various plasma conditions, including DC-arc discharge, RF discharge, f = 200 kHz and MW discharge, under pressure p = 0.3-8 mbar.
37
Sensitive CH 4 detection applying quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy
TL;DR: Sensitive detection of atmospheric methane employing quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy (OF-CEAS) with a detection limit of 39 parts per trillion of CH4 at atmospheric pressure within 50 s acquisition time was found.
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