An optical sensor and method are disclosed for use with a visible-light laser excitation beam (60) and a Raman spectroscopy detector, for detecting the presence chemical groups in an analyte (80) applied to the sensor. The sensor includes a substrate (10), a plasmon resonance mirror (20) formed on a sensor surface of the substrate (10), a plasmon resonance particle layer (40) disposed over the mirror (20), and an optically transparent dielectric layer (30) about 2-40 nm thick separating the mirror (20) and particle layer (40). The particle layer (40) has a periodic array of plasmon resonance particles with (i) a coating to binding analyte molecules (80), (ii) substantially uniform particle sizes and shapes in a range between 50-200 nm (ii) a particle-to-particle spacing less than the wavelength of the laser excitation beam. The device is capable of detecting single analyte molecules (80) with an amplification factor of up to 1012­ 1014.

Optical sensor with layered plasmon structure for enhanced detection of chemical groups by sers

A microwave oven includes a microwave generation device and a case. Three antennas are provided in the case. The two antennas are opposite each other along a horizontal direction. In the microwave generation device, a power distributor almost equally distributes a microwave generated by a microwave generator among phase variators. Each of the phase variators adjusts the phase of the fedmicrowave. This causes a phase difference between microwaves respectively radiated from the opposite two antennas to change. The microwaves are respectively radiated from the antennas.

Microwave processing apparatus

An apparatus for cutting a substrate includes a laser oscillator generating a femtosecond laser beam, a first beam splitter splitting the femtosecond laser beam into first and second femtosecond laser beams, a first condenser lens receiving the first femtosecond laser beam and condensing the first femtosecond laser beam to have a first focal depth, a second condenser lens receiving the second femtosecond laser beam, and condensing the second femtosecond laser beam to have a second focal depth different from the first focal depth, and a second beam splitter receiving and splitting the first femtosecond laser beam condensed through the first condenser lens and the second femtosecond laser beam condensed through the second condenser lens, and irradiating the split first and second femtosecond laser beams at different positions on a substrate to be cut

Apparatus for cutting substrate and method using the same

Provided are a defect inspection apparatus having a large range for receiving light scattering from fine defects while securing a sufficiently large signal strength; and a defect inspection method for the same. The defect inspection apparatus includes: a stage part capable of traveling relative to optical systems with a substrate to be inspected mounted on the stage part; an illumination optical system for illuminating an inspection area on the substrate; a detection optical system for detecting light coming from the inspection area on the substrate; an image sensor for converting, to a signal, an image which is formed on the image sensor by the detection optical system; a signal processor for detecting defects by processing the signal from the image sensor; and a plane reflecting mirror, arranged between the detection optical system and the substrate, for transmitting the light, which comes from the substrate, to the detection optical system.

Defect inspection method and defect inspection apparatus

An opening fabricating apparatus for creating an opening with desired dimensions at a mask tip of a near-field optical microscope, and a near-field optical microscope using the same are provided. The apparatus comprising: a light source 116; reflection means 140; light detection means 124; press means 128, 130 pressing a probe tip against said reflection means; storage means 142; calculation means 144 figuring out the quantity of light of the reflected light for the acquisition of said opening with desired dimensions from the calibration information stored in said storage means; and press control means 126 controlling pressing of said probe tip against said reflection means so as to allow the quantity of light of said reflected light to become equal to the quantity figured out by said calculation means. The probe opening fabricating apparatus is capable of readily fabricating an opening of desired dimensions with a high reproducibility.

Probe opening fabricating apparatus, and near-field optical microscope using the same

PROBLEM TO BE SOLVED: To accurately process a micro machining in the order of nanometer. SOLUTION: The intensity of a reflected light from a work 110 which is irradiated with a femtosecond laser beam is detected with first and second optical detectors 67A and 67B, the intensity of a plasma light generated by abrasion is detected with a third optical detector 67C, a moving table 11 is controlled with a first controlling computer 61 so that the work 110 is fixed at a focus position on the basis of the detection outputs of the first and the second optical detectors 67A and 67B, a micro moving table 13, which finely moves the work 110 mounted on the moving table 11 in the direction of the optical axis of a condensing part 50 of the femtosecond laser beam, is so controlled with a second controlling computer 62 that the work 110 is fixed at a more accurate focus position with a minimum laser beam intensity given on the basis of the detected output of the third optical detector 67C, and the computer 62 controls a power controlling part 30 which controls the power of the femtosecond laser beam.

Micro machining device

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an opening of a probe, capable of easily measuring the opening of a desired size. SOLUTION: The apparatus 139 for manufacturing the opening of the probe for opening a mask at a distal end of the probe in a desired size comprises a light source 116 for introducing a light to the probe; a photodetecting means 140 contacted with the distal end of the probe to detect the transmitted light amount of the light of the source 116 from the end; pressing means 114 and 130 for pressing the end of the probe to the means 140 in an optical axis direction; a memory means 142 for previously storing an amount of the transmitted light from the end of the probe and detecting amount information of the size of the opening; a calculating means 144 for obtaining the amount of the light for obtaining opening of the desired size from the detecting amount information stored in the means 142; and pressing control means 126 and 128 for controlling pressing of the end of the probe by means 114 and 130 in the optical axis direction of the means 140, with the amount detected by the means 140 becoming the amount calculated by the means 144.

Apparatus for measuring opening of probe and near-field optical microscope using the same

PROBLEM TO BE SOLVED: To attain an optical fiber probe with a large working distance to a scan by a regular travel light spot. SOLUTION: A core of a single-mode optical fiber FV is provided with a conical near-field light exudation face, having a first taper angle: α, and a conical regular travel light exit face, coaxially surrounding the near-field light exudation face and having a second tapered angle: β. A conductive thin film 120 is formed on the near-field light exudation face so as to implement a near-field light exudation. A cladding section 103 has a solution speed with respect to an etching liquid, which is higher than that of the core. The core is provided with first and second cores 101, 102 disposed coaxially and having different solution speeds. The near-field light exudation face 110 is formed in the first core 101, and the regular travel light exit face 112 is formed in the second core 102 by a selective (chemical) etching process; and the second tapered angle: β is more than 50° and less than 90°. COPYRIGHT: (C)2008,JPO&INPIT

Optical fiber probe and manufacturing method, inspecting apparatus and inspecting method of the optical fiber probe

PROBLEM TO BE SOLVED: To make the diameter of aperture of an optical fiber probe extremely small by sufficiently achieving a transmission efficiency of light, by forming sharp section having three steps of inclination taper angles at one end of an optical fiber probe in which a clad is provided around the core. SOLUTION: The sharp section 3 having three steps of inclination taper angles is formed at one end of an optical fiber probe in which a clad 2 is provided around a core 1. Faces having respective inclination taper angles forming the sharp section 3 are designated as a first taper face 3a, a second taper face 3b and a third taper face 3c from the tip side, respectively. The inclination angle α of the first taper face 3a is made small and the effective diameter of aperture is made extremely small so that the resolution is improved. In a case where the inclination angle is sharpened in a cone shape, the more the inclination angle is reduced the more the loss of the light is increased so that the transmission efficiency is lowered. In the case where the sharp section has three steps of angles, even when the inclination angel α is reduced, an inclination angle β of the second taper face 3b can be increased or an inclination angle γ of the third taper face 3c can be adjusted so that the transmission efficiency can be raised.

Optical fiber probe and manufacture thereof

PROBLEM TO BE SOLVED: To facilitate machining by pulsed laser by lowering the threshold of material machining through chirp control even for a pulse with the same peak value. SOLUTION: A ultra-short pulsed laser in the ultraviolet region (wavelength 290 nm) is generated by a light source 10 and, after passing through a first prism pair 20 that gives a positive chirp to the ultra-short pulsed laser and a second prism pair 30 that gives a negative chirp, converged by a condensing lens 40, so as to be emitted to an aluminum vapor deposition mirror 60 which is a workpiece on a moving stage 50. The quartz prisms 21, 22 comprising the first prism pair 20 are relatively displaced parallelly to each other, so that the optical path length in the quartz prisms 21, 22 is manipulated and that the chirp quantity and the chirp direction are controlled. COPYRIGHT: (C)2004,JPO

Laser beam machining method and device

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