Michael Beutl
ams AG
1 Papers
16 Citations
Michael Beutl is an academic researcher from ams AG. The author has an hindex of 1, co-authored 1 publications.
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Papers
Patent
Method for Producing a Semiconductor Component, and Semiconductor Component
Franz Schrank,Günther Koppitsch,Michael Beutl,Sara Carniello,Jochen Kraft +4 more
- 25 Jun 2009
TL;DR: In this paper, a connection pad is arranged in the insulation layer of an SOI substrate, and a contact hole opening is provided with a metalization on side walls and on the connection pad.
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