Marie Angelopoulos
IBM
181 Papers
3.3K Citations
Marie Angelopoulos is an academic researcher from IBM. The author has contributed to research in topics: Resist & Polymer. The author has an hindex of 33, co-authored 181 publications.
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Papers
Image collapse issues in photoresist
John P. Simons,Dario L. Goldfarb,Marie Angelopoulos,Scott A. Messick,Wayne M. Moreau,Christopher F. Robinson,Juan J. de Pablo,Paul F. Nealey +7 more
- 24 Aug 2001
TL;DR: The continued shrinkage of line widths below 150nm has not been without concerns of the mechanical stability of the resist structure as discussed by the authors, and the development of the exposed resist undergoes many phase changes such as solid solubilization into a liquid followed by drying by volatilization.
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Optical and EPR studies of LiCl pseudodoping of emeraldine base
A. Saprigin,R. S. Kohlman,S.M. Long,Keith R. Brenneman,Arthur J. Epstein,Marie Angelopoulos,Y. H. Liao,W. Zheng,Alan G. MacDiarmid +8 more
TL;DR: In this article, the pseudodoping of the emeraldine base (EB) form of polyaniline with protonic acids with Li + ions was reported, based on defect states in the bandgap and associated spins for EB processed with LiCl.
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Conducting polymers as lithographic materials
Marie Angelopoulos,Jane M. Shaw,Kam-Leung Lee,Wu-Song Huang,Marie-Annick Lecorre,Michel Tissier +5 more
TL;DR: In this paper, a high resolution conducting photo and electron-beam resist was found to be suitable for several lithographic applications and polyaniline was used as a conducting layer below the imaging resist.
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Aggregation and interchain “self” doping in emeraldine base
S.M. Long,Keith R. Brenneman,A. Saprigin,R. S. Kohlman,Arthur J. Epstein,Marie Angelopoulos,S.L. Buchwalter,A. Rossi,W. Zheng,Alan G. MacDiarmid +9 more
TL;DR: In this article, the authors report gel permeation chromatography, electron paramagnetic resonance and optical absorption measurements on the emeraldine base (EB) form of polyaniline synthesized using different oxidant and aniline ratios in the range of 0.25 to 1.0.
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Patent
Electrically conductive and abrasion/scratch resistant polymeric materials, method of fabrication thereof and uses thereof
Ali Afzali-Ardakani,Marie Angelopoulos,Jack Alvin Dickerson,Thomas Baird Pillsbury,Karl J. Puttlitz,Jane Margaret Shaw,Jeffrey D. Gelorme +6 more
- 07 Jun 1995
TL;DR: In this article, a mixture of abrasion resistant materials and electrically conductive polymeric materials are formed, which can be used as an arc light transmitting electrostatic discharge layer.
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