M. Yoshida
Tohoku University
2 Papers
M. Yoshida is an academic researcher from Tohoku University. The author has contributed to research in topics: Etching (microfabrication) & Dry etching. The author has an hindex of 2, co-authored 2 publications.
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Papers
Wafer-to-wafer selective flip-chip transfer by sticky silicone bonding and laser debonding for rapid and easy integration test
Shuji Tanaka,M. Yoshida,Hideki Hirano,T. Somekawa,M. Fujita,Masayoshi Esashi +5 more
- 07 Mar 2013
TL;DR: Wafer-bonding-based integration can be rapidly and easily tested between different types of devices by wafer-to-wafer flip-chip transfer technology described in this paper.
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YAG laser assisted etching for releasing silicon micro structure
Kazuyuki Minami,Yuji Wakabayashi,T. Matsubara,K. Yoshimi,M. Yoshida,Masayoshi Esashi +5 more
- 07 Feb 1993
TL;DR: YAG laser assisted etching techniques were developed and investigated for releasing silicon micro structures as mentioned in this paper, where HCl, SF/sub 6/ etc., which produce volatile exhaust, were used as etching gas at atmospheric pressure.
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