M. Makino
The Welding Institute
3 Papers
27 Citations
M. Makino is an academic researcher from The Welding Institute. The author has contributed to research in topics: Sputtering & X-ray photoelectron spectroscopy. The author has an hindex of 3, co-authored 3 publications.
Chat about Author
Papers
Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering
TL;DR: In this paper, an inductively coupled plasma assisted reactive direct current magnetron sputtering was used for the deposition of titanium oxide films on unheated glass substrates by using X-ray diffraction, Xray photoelectron spectroscopy and field emission scanning electron microscope.
22
Metallic sputtering growth of crystalline titanium oxide films on unheated glass substrate using inductively coupled plasma assisted direct current magnetron sputtering
TL;DR: In this article, an inductively coupled plasma (ICP) assisted direct current (dc) magnetron sputtering system was used for depositing titanium oxide (TiO) films on unheated glass substrates.
10
Structure and properties of Ti–Si–N films with ∼ 10 at.% Si deposited using reactive magnetron sputtering with high-flux low-energy ion assistance
TL;DR: In this paper, the effects of ion flux and ion energy on the structure and hardness of as-deposited films were investigated and it was found that high-flux ion irradiation with energy of 20 eV caused microstructure to change from non-assisted amorphous columnar form to one where there are globular nanocrystallites of TiN (nc-TiN) embedded in amorphously Si 3 n 4 (a-Si 3 N 4 ) network.
6