Piezoelectric micromachined ultrasonic transducers (pMUTs) are an example of the application of MEMS technology to ultrasound generation and detection, which is expected to offer many advantages over conventional transducers. In this work, we investigate pMUTs through novel design and fabrication methods. A finite element (FE) model, with original tools to measure device performance, was developed to design and optimize pMUTs. A pMUT for the operating range of 2–10 MHz in water and having maximized energy coupling coefficient was modeled, designed, fabricated, and tested for its resonance frequency and coupling coefficient. The model predictions for the resonance frequency were in excellent agreement with the measured values, but not as good for the coupling coefficient due to the variability in the measured coupling coefficient. Compared to conventional ultrasonic transducers, pMUTs exhibit superior bandwidth, in excess of 100%, and offer considerable design flexibility, which allows their operation frequency and acoustic impedance to be tailored for numerous applications.

Development of piezoelectric micromachined ultrasonic transducers

This series of two papers considers piezoelectrically actuated flextensional micromachined ultrasound transducers (PAFMUTs) and consists of theory, fabrication, and experimental parts. The theory presented in this paper is developed for an ultrasound transducer application presented in the second part. In the absence of analytical expressions for the equivalent circuit parameters of a flextensional transducer, it is difficult to calculate its optimal parameters and dimensions and difficult to choose suitable materials. The influence of coupling between flexural and extensional deformation and that of coupling between the structure and the acoustic volume on the dynamic response of piezoelectrically actuated flextensional transducer are analyzed using two analytical methods: classical thin (Kirchhoff) plate theory and Mindlin plate theory. Classical thin plate theory and Mindlin plate theory are applied to derive two-dimensional plate equations for the transducer and to calculate the coupled electromechanical field variables such as mechanical displacement and electrical input impedance. In these methods, the variations across the thickness direction vanish by using the bending moments per unit length or stress resultants. Thus, two-dimensional plate equations for a step-wise laminated circular plate are obtained as well as two different solutions to the corresponding systems. An equivalent circuit of the transducer is also obtained from these solutions.

Piezoelectrically actuated flextensional micromachined ultrasound transducers. I. Theory

This paper presents novel micromachined two-dimensional array piezoelectrically actuated flextensional transducers that can be used to generate sound in air or water. Micromachining techniques to fabricate these devices are also presented. Individual unimorph array elements consist of a thin piezoelectric annular disk and a thin, fully clamped, circular plate. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz with 0.15 /spl mu/m/V peak displacement. The devices have a range of operating resonance frequencies starting from 450 kHz to 4.5 MHz. Such an array could be combined with on-board driving and addressing circuitry for different applications.

Piezoelectrically actuated flextensional micromachined ultrasound transducers. II. Fabrication and experiments

This paper presents micromachined two dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report an an optimum design for an individual array element based on finite element modelling (FEM). We manufacture the transducer in two dimensional arrays using planar silicon micromachining. Such an array could be combined with an on-board driving and an addressing circuitry.

Micromachined 2-D array piezoelectrically actuated flextensional transducers

This paper considers variational methods to derive two-dimensional plate equations for piezoelectrically actuated flexural mode ultrasound transducers. In the absence of analytical expressions for the equivalent circuit parameters of a flexural mode transducer, it is difficult to calculate its optimal parameters and dimensions, and to choose suitable materials. The influence of coupling between flexural and extensional deformation, and coupling between the structure and the acoustic volume on the dynamic response of piezoelectrically actuated flexural mode transducer is analyzed using variational methods. Variational methods are applied to derive two-dimensional plate equations for the transducer, and to calculate the coupled electromechanical field variables. In these methods, the variations across the thickness direction vanish by using the stress resultants. Thus, two-dimensional plate equations for a stepwise laminated circular plate are obtained.

Plate equations for piezoelectrically actuated flexural mode ultrasound transducers

Calculation and investigation of flexural-mode piezoelectric disk transducers on a passive substrate in reception and radiation

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Calculation and investigation of flexural-mode piezoelectric disk transducers on a passive substrate in reception and radiation