http://xrm.phys.northwestern.edu/research/pdf_papers/2004/egerton_micron_2004.pdf

Radiation damage in the TEM and SEM.

Small metal particles (<5 nanometers), which are widely used in catalysis, have physical and chemical properties that are markedly different from those of the bulk metal. The differences are related to crystal structure, and it is therefore significant that structral rearrangements in small particles have been observed in real time by using high-resolution electron microscopy. A detailed investigation at the atomic level has been made of the factors affecting the dynamic activity of small gold crystals that are supported on thin films of amorphous carbon, silicon, and germanium. The rate of activity depends mainly on the current density of the incident electron beam and the degree of contact of the particle with the substrate, but this rate decreases rapidly as the particle size is increased. The activity of the particles is very similar on either carbon or silicon, but it is generally less marked on germanium because of increased contact between the particle and the substrate. The electron beam effectively heats the particles, and it appears that their dynamic behavior depends on their thermal contact with the substrate.

https://science.sciencemag.org/content/sci/233/4766/872.full.pdf

Dynamic Atomic-Level Rearrangements in Small Gold Particles

Basic questions related to electron-induced sputtering in the TEM

Physical mechanisms of sputtering

We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.

Beam-Induced Damage to Thin Specimens in an Intense Electron Probe

Evaporated (111) gold foils 200–1000 A thick have been irradiated with electrons in a high voltage electron microscope at energies from 0·5 to 1·1 MeV to study the sputtering behaviour. Transmission-sputtered atoms were collected on a carbon film and their spatial distribution was determined by X-ray microanalysis. The angular distribution of sputtered intensity was found to be strongly energy-dependent, exhibiting a single central maximum for 0·5 MeV and three symmetrically disposed maxima for energies above 0·6 MeV, all of which became increasingly sharp at higher energies. The main features of the results are explained at an atomic level with the aid of a molecular dynamics programme, and the roles of collision sequences, steering of trajectories by neighbouring atoms, and thermal vibration effects are elucidated. We find that, at energies 0·6 MeV, up to ∼40% of the total yield comprises surface atoms sputtere...

Sputtering of gold foils in a high voltage electron microscope A comparison of theory and experiment

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Sputtering of gold foils in a high voltage electron microscope A comparison of theory and experiment