Engineering of molecular architectures of β-diketonate precursors toward new advanced materials

The unique geometry of multilayer thin films, with layer thicknesses on the nanoscale, gives rise to a wide range of novel properties and behavior that are not observed in the bulk. The novel behavior is critically dependent on the microstructure of the films. This paper reviews the use of a range of transmission electron microscopy (TEM) techniques to elucidate the structure, chemistry, and properties of multilayer thin films. The paper includes a brief introduction to the technological applications to which multilayer thin films are suited, followed by a description of the various TEM techniques. The final section of the paper presents the application of these techniques to various multilayer thin film systems.

/pdf/transmission-electron-microscopy-of-multilayer-thin-films-1a5fgnrtda.pdf

Transmission Electron Microscopy of Multilayer Thin Films

Thin molybdenum oxide films produced by molybdenum pentacarbonyl 1-methylbutylisonitrile with plasma-assisted chemical vapor deposition

Nanocrystalline original Cr-based coatings were grown under atmospheric pressure by Direct Liquid Injection Metal Organic Chemical Vapor Deposition (DLI-MOCVD). The thin films were grown below 450 °C in a cold wall CVD reactor from solutions of Cr(CO)6 in toluene or THF injected and flash vaporized with or without NH3 addition prior to the deposition zone. Original nanocrystalline chromium oxycarbide and oxy-carbonitride phases were deposited on stainless steel substrates. The influence of injection parameters and conventional CVD conditions have been investigated on the main chemical, physical and structural characteristics of the coatings, as deduced from XRD, SEM, and EPMA analyses.

https://oatao.univ-toulouse.fr/388/2/douard_388.pdf

Nanocrystalline chromium-based coatings deposited by DLI-MOCVD under atmospheric pressure from Cr(CO)6

Synthesis, structure and properties of monomeric strontium and barium complexes containing terminal η2-3,5-di-tert-butylpyrazolato ligands

MOCVD is a suitable technique for the synthesis of functional metal oxide thin films. In the present paper, injection-MOCVD was proved to be an efficient method, not only to grow single layers, but also heterostructures and superlattices of functional oxide materials. We report on the deposition of BaxSr1−xTiO3 (BST) films and BaTiO3/SrTiO3 superlattices [(BTO/STO)n] obtained by injection MOCVD. In a first step, BST films were deposited on various substrates such as LaAlO3(LAO)(012), SrTiO3:Nb(STO:Nb)(001) and Al2O3(0001), resulting in epitaxial films in the case of STO or LAO substrates and highly textured films in the case of Al2O3 substrates. The good crystallinity of the films obtained was evidenced using X-ray analysis. Concerning the dielectric properties of BST films on STO:Nb, the Tc values were found to be the same as those for bulk materials. In a next step the feasibility of (BTO/STO)n superlattices was studied. The multilayers obtained were epitaxially grown on LAO and STO:Nb substrates. XPS was used to check in detail the pattern repetition of the superlattice and proved the low interface roughness of 1 nm as well as the absence of carbon contamination in the film. The measured periodicity of these superlattices were found to be in good agreement with simulation experiments. Further superlattices have been obtained by combining ferroelectric, magnetic (CMR) and superconducting (HTS) oxides. Typical results of these superlattices will be reported.

Injection MOCVD: ferroelectric thin films and functional oxide superlattices

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Injection MOCVD: ferroelectric thin films and functional oxide superlattices