Recent trends in piezoelectric actuators for precision motion and their applications: a review

Precision positioning systems with large working stroke (millimeter or more) and micro/nano-scale positioning resolution are widely required in both scientific research and industries. For this kind of applications, piezoelectric materials based actuators show unique advantages and have been widely employed. To overcome the demerit of the limited working stroke for single piezoelectric element, various stepping motion principles have been proposed in the past years, and accordingly, stepping piezoelectric actuators with various structures have been designed and evaluated. This review is aimed to summarize the recent developments and achievements in stepping piezoelectric actuators with large working stroke. Especially, the emphasis is on three main types of stepping piezoelectric actuators, i.e., inchworm type, friction-inertia type, and parasitic type. The motion principles of these three types of piezoelectric actuators and the corresponding developments of various actuators are discussed respectively, followed by pointing out the existing problems in these three types of piezoelectric actuators and proposing some potential research directions in this topic. It is expected that this review is helpful for relevant researchers to understand stepping motion principles as well as piezoelectric actuators, and to successfully select and design stepping piezoelectric actuators for specific applications.

Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review

A trapezoid-type stick–slip piezoelectric linear actuator using a right circular flexure hinge mechanism was proposed, designed, fabricated, and tested with the aim of accomplishing linear driving based on stick–slip motion. The angle adjustment of the trapezoid beam was used for generating lateral motion on the driving foot of the flexure hinge mechanism. A method of tuning the lateral motion of the flexure hinge mechanism was discussed. Based on the finite-element method, a proper angle of the trapezoid beam was obtained. The analysis results proved that asymmetrical flexure hinge mechanism can increase static friction force in slow extension stage and decrease kinetic friction force in quick contraction stage by lateral motion of the driving foot. A prototype was fabricated and its experimental system was established. The mechanical output experiments showed that the prototype achieved maximum output velocity and load of 5.96 mm/s and 3 N at a voltage of 100 V $p-p$ and a frequency of 500 Hz, respectively.

A Novel Trapezoid-Type Stick–Slip Piezoelectric Linear Actuator Using Right Circular Flexure Hinge Mechanism

A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab /Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.

Development of a Novel Parasitic-Type Piezoelectric Actuator

A review of recent studies on non-resonant piezoelectric actuators

This paper presents a novel piezo-driven rotary actuator based on the parasitic motion principle. Output performances of the rotary actuator were tested and discussed. Experiment results indicate that using only one piezoelectric actuator and simple sawtooth wave control, the rotary actuator reaches the rotation velocity of about 20,097 μrad/s when the driving voltage is 100 V and the driving frequency is 90 Hz. The actuator can rotate stably with the minimum resolution of 0.7 μrad. This paper verifies feasibility of the parasitic motion principle for applications of rotary actuators, providing new design ideas for precision piezoelectric rotary actuators.

Note: A novel rotary actuator driven by only one piezoelectric actuator

The invention relates to a symmetric bionic hexapoda walking device and belongs to a robot. The symmetric bionic hexapoda walking device comprises an upper layer mechanism and a lower layer mechanism, wherein the upper layer mechanism and the lower layer mechanism are same in structure and centrosymmetric; the upper layer mechanism is connected to the lower layer mechanism through a central steering unit; the central steering unit comprises a bevel gear I, a steering shaft, a bevel gear II and a motor; and the motor is connected to the steering shaft through a bevel gear pair composed of the bevel gear I and the bevel gear II. A novel bionic hexapoda walking mechanism is designed on the basis of bionics. A gait motion mode of a hexapoda insect is taken as a template of the bionic hexapodawalking mechanism, wherein a propodium and a metapodium on one side and a mesopodium on the other side are taken as one set and a triangular support mechanism is formed when the bionic hexapoda walking mechanism walks for one step. Such a walking mode is characterized by low center of gravity and fast response, so that the novel bionic hexapoda walking mechanism has ultrahigh structural stability. Meanwhile, a rotating shaft is designed in the central position of a robot mechanism, so that the robot mechanism provided by the invention has a double-layered flexible structure and can be more conveniently steered.

Symmetric bionic hexapoda walking device

The utility model relates to a six-degree of freedom microminiature robot based on combination drive and belongs to the field of micro electronic mechanical system precision instruments. The six-degree of freedom microminiature robot comprises a flexible body frame, primary displacement amplification mechanisms, secondary displacement amplification mechanisms, piezoelectric stacks and miniature electromagnets. The piezoelectric stacks serves as a driving part of the microminiature robot and are disposed in the body frame and the primary displacement amplification mechanisms; the secondary displacement amplification mechanisms and the primary displacement amplification mechanisms are bound together to form two-stage displacement amplification mechanisms capable of amplifying output displacements of the piezoelectric stacks at a high rate; the secondary displacement amplification mechanisms are installed on base plates on four sides of the flexible body frame symmetrically through screws and are in stationary fit with the flexible body frame; and the miniature electromagnets are connected with the secondary displacement amplification mechanisms through screws and serve as supporting and clamping parts of the robot. The six-degree of freedom microminiature robot is capable of realizing precision movement and location of six degrees of freedom based on the combination drive of piezoelectricity and electromagnetism and has the advantages of long strokes and high resolution.

Six-degree of freedom microminiature robot based on combination drive

The invention relates to a micro-nano simulation rotating drive device, which belongs to the precise and super-precise machining field. The micro-nano simulation rotating drive device mainly consists of a stator and a rotor, wherein a drive piezoelectric stack is encapsulated inside the stator; and the rotor is a variable-type interface shaft. A high-precision piezoelectric drive device is used for driving a lever amplification flexible hinge structure to perform associated clamping, and the stepper super-precision rotation movement for the rotor to rotate along a fixed shaft is realized by controlling the clamping sequence of a piezoelectric clamping mechanism in the stator. The micro-nano simulation rotating drive device can be used for the high-precision drive and machining field, and has advantages of less investment, low cost, fast effect, high benefit and the like. The micro-nano simulation rotating drive device is a piezoelectric single-degree-of-freedom precision rotating drive device which can improve the system micro precision and reduce the structural size and can make super-precision stepper rotation movement along a determined direction.

Micro-nano simulation rotating drive device

Multi-degree-of-freedom micronano-level bionic precision rotary driver

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