The utility model relates to a wedge-structure precision positioning lifting platform on semiconductor processing equipment. The precise positioning lifting platform of the wedge-shaped structure comprises an L-shaped base, two parallel horizontal linear guide rails are mounted on the inner side of a horizontal plate of the L-shaped base, two parallel vertical linear guide rails are arranged on the inner side of a vertical plate of the L-shaped base, a wedge block is arranged on the horizontal linear guide rails through a sliding block, an inverted-wedge-shaped workbench is arranged on an inclined face of the wedge block, and a vertical face of the inverted-wedge-shaped workbench is in contact with the vertical linear guide rails. By adoption of the creative wedge-shaped structure of the technical scheme in the utility model, the positioning lifting platform is small and compact, can achieve high-precision vertical positioning, and has a relatively large vertical stroke.

Wedge-structure precision positioning lifting platform on semiconductor processing equipment

The invention discloses an inchworm-imitating piezoelectric rotary driver, which comprises output shafts, clamping and pretightening bolts, clamping and pretightening rings, restoring springs, annular clamping piezoelectric stacks, driving piezoelectric stack holders, driving arms, driving piezoelectric stacks, driving and pretightening blocks, driving and pretightening bolts and a base; the characteristic of rack-gear transmission is imitated by the driving piezoelectric stacks and the driving arms, one end of each driving piezoelectric stack is machined into the shape of the rack tooth profile, the surface of each driving arm, which is in contact with the driving piezoelectric stack, is machined into the shape of the gear involute profile, and such contact surfaces ensure that the driving units do not have motion interference, so that driving is more accurate; the annular clamping piezoelectric stacks are adopted as clamping units, rotational clamping is realized by extending both ends of each annular clamping piezoelectric stack and utilizing the static friction force between the planes, the clamping area is large, moreover, the contact between the clamping surfaces is sufficient, and high-precision and high-load output can be realized.

Inchworm-imitating piezoelectric rotary driver

The invention discloses a two-freedom-degree rotation-line motion micro ultrasonic motor based on a piezoelectric cylinder The motor comprises a piezoelectricity driver stator, a shaft, a motion guide device, an elastic pre-pressure device and a drive power supply, wherein the piezoelectricity driver stator comprises the piezoelectric cylinder, an annular meta end cap is respectively attached to two ends of the piezoelectric cylinder, the motion guide device comprises a rotation-line motion bearing and a base, the shaft penetrates into the piezoelectric cylinder and is limited by the motion guide device to do a rotary or linear motion, the annular metal end caps are pressed on the shaft, and the elastic friction contact of the piezoelectric cylinder and the shaft is achieved under the pre-pressure action The invention provides a two-freedom-degree rotation-line drive mechanism which is compact in structure The motor is simple in structure, small in size and wide in application prospects

Two-freedom-degree rotation-line motion micro ultrasonic motor

Inchworm type multi-degree of freedom piezoelectric driving device

Rotation type driving device and method based on three piezoelectric stacks

Multi-degree-of-freedom micronano-level bionic precision rotary driver

Ultraprecise piezoelectric stepping rotation driving platform capable of regulating speed mechanically

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Multi-degree-of-freedom micronano-level bionic precision rotary driver

Ultraprecise piezoelectric stepping rotation driving platform capable of regulating speed mechanically