We propose a photolithographic method to fabricate nanostructures by employing a localized surface plasmon (LSP) mask generated by a soft mold on a thin metal film. The soft mold can be formed by transparent materials, such as polydimethylsiloxane, contacting firmly to the metal film. The pattern edges of the mold, serving as the fine tapers, can be used to excite LSPs and accumulate a large amount of localized energy from the incident light field, providing a modulated optical field in the resist with nanometer feature size. Nanolithographic results with a minimum feature size of 30nm are demonstrated.

Nanolithography method by using localized surface plasmon mask generated with polydimethylsiloxane soft mold on thin metal film.

During the last decades light was successfully modelled by micro and nano structures such as photonic crystals, gratings, wave couplers, and, in past years, also negative index materials. For the visible range a further miniaturization of the feature sizes of these metamaterials is necessary. Advanced fabrication facilities as well as investigation techniques are required by science and industry. This chapter deals with spectroscopic ellipsometry (SE) applied to the investigation of metallic gratings and the comparison with theoretical simulations. The comparison of theoretical and experimental spectra of metallic gratings provides a useful basis for more complicated metamaterials, such as negative index materials. This analysis is shown in the beginning of this chapter. Deviations in the structure are identified and it is shown that RCWA and SE constitute a powerful combination to analyze nanostructures. It is followed by the study of surface plasmons on metallic grating which are excited due to the periodic structure. These excitation frequencies are clearly visible in the ellipsometric spectra due to a phase shift and the ratio of reflected intensities between \(s\) and \(p\) polarization.

Spectroscopic Ellipsometry on Metallic Gratings

Tailoring surface plasmon (SP) resonances using metallic nanostructures for optical manipulation has been widely investigated in recent years; and there are many puzzles yet to be solved in this relatively new area. This thesis covers the study of the interaction of light with SP-supporting planar/patterned metallo-dielectric multilayer structures. Two separate, but closely related subjects were investigated using such structures, which are: SP-assisted optical transmission and optical metamaterials. The physical mechanisms of the SP-assisted transmission phenomenon were studied using planar/grating and planar/hole-array multilayer structures. Extraordinary light transmission has been demonstrated through experimental work and simulations for both arrangements; and the effects of different structural parameters on the transmission efficiencies of the structures were analyzed systematically. The interplays of the surface plasmon polaritons (SPPs) and localized surface plasmons (LSPs) in the extraordinary optical transmission (EOT) phenomenon were identified. The potential of the planar/hole-array multilayer structures as optical magnetic metamaterials was evaluated using two independent electromagnetic simulation techniques. The ability of such structures to produce strong magnetic resonances from infrared down to visible side of spectrum was revealed. The methods of tuning the magnetic response of the

Optical Manipulation Using Planar/Patterned Metallo-dielectric Multilayer Structures

Demonstrated that analog of diffractive and refractive 3D optics in free space can be developed to manipulate surface waves such as surface plasmon polaritons (SPPs). It has been shown that an air-gap control of a floating dielectric block can generate the dynamic phase and amplitude modulation of the SPP transmission coefficient. Unlike conventional bulk optics, the nano-scale surface optics for SPP processing contains several unexpected and interesting features in addition to the physical features described. Dynamic plasmonic information processing on the nano-scale using air-gap control may be an effective mechanism for building a dynamic plasmonic information processing system.

/pdf/3d-diffractive-focusing-thz-of-in-plane-surface-plasmon-tfbu2be3re.pdf

3D Diffractive Focusing THz of In-Plane Surface Plasmon Polarition Waves

We designed and fabricated multilayer metal/metal-oxide surface relief diffractive grating structures by growing alternating Pt and SnOx layers. Optical interrogation at 633 nm reveals the temperature dependence of their reflection and transmission diffractive effects. This function is explored here in the context of a remote, spatially localized, photonic temperature sensing operation, achieving sensitivity of 10% per °C for the zeroth-order in the transmission mode. The experimental demonstration is found to be in good agreement with the results of rigorous coupled wave analysis of the composite metal/metal-oxide element.

Multilayer metal/metal-oxide diffractive structure for photonic temperature sensing

Surface plasmons (SPs) – charge oscillations on metallo-dielectric interfaces – offer the possibility of controlling light at a scale much smaller than its wavelength, even down to the nanometre scale for visible wavelengths Experiments have been performed to study the influence of SPs on the optical transmission of metallic multilayers in which one of the layers has been patterned at the nanometre scale to excite localised and extended SP modes Films with linear gratings or two-dimensional hole arrays have been studied, and exceptionally-high transmission levels (up to 39%) are measured for these otherwise-opaque systems The transmission resonances can be designed to be much narrower than for an equivalent Fabry-Perot filter, and can be tuned with geometrical parameters (film thicknesses and/or grating dimensions) or illuminations conditions (angle of incidence or polarisation) The measured dispersion of the transmission maxima agrees with the theoretical dispersion of extended surface plasmon polariton (SPP) modes on a planar metal film, which strongly suggests that the excitation of these SPP modes is responsible for the transmission features This is further supported by rigorous electromagnetic simulations

Plasmon-enhanced optical transmission of nanostructured metallic multilayers

A study on extraordinary optical transmission through planar metallic films closely coupled to periodic sub-wavelength structures is presented. The measured spectral positions of transmission maxima match well with the surface plasmon polariton (SPP) dispersion relations. The experimental results are further supported by rigorous coupled wave analysis (RCWA) simulations. The exceptional transmission is a result of coupling between the localized surface plasmon (LSP) mode existing in periodic sub-wavelength structures and the SPP modes on the planar metal films.

/pdf/enhanced-optical-transmission-through-planar-metallic-films-3vxsoptd0z.pdf

Enhanced optical transmission through planar metallic films via excitation of surface plasmons

We present a simple design of a magnetic resonant structure consisting of a single patterned metallic layer coupled to a planar metal film Using rigorous coupled wave analysis (RCWA) simulations, we show that the structure can produce a strong magnetic response and provide negative permeability at optical wavelengths The results are further supported by finite element method (FEM) based simulations We also discuss the effects of the material used for different metallic layers on the magnetic response of the structure

http://iopscience.iop.org/1464-4258/9/9/S17/pdf/1464-4258_9_9_S17.pdf

Negative permeability using planar-patterned metallic multilayer structures

We propose a design for optical-frequency double-negative metamaterials (DMNs) in which the unit cell is formed by a single-layer plasmonic inclusion. By introducing some properly arranged stepwise modulations onto the inclusions, the effective permittivity and permeability of the material may become simultaneously negative due to the excitation of higher-order multipole plamonic (electrostatic) resonances. The approach opens a possibility to construct low-loss optical DNMs with great engineering simplicity.

Design of double-negative metamaterials using single-layer plasmonic structures

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Papers

Plasmon-enhanced optical transmission of nanostructured metallic multilayers

Enhanced optical transmission through planar metallic films via excitation of surface plasmons

Negative permeability using planar-patterned metallic multilayer structures

Design of double-negative metamaterials using single-layer plasmonic structures