The present invention relates to a real-time measurement and processing apparatus for controlling and monitoring a processing thickness of a thin film and a real-time measurement and a processing method therefor. The purpose of the present invention is to provide real-time measurement and a processing apparatus for controlling and monitoring the processing thickness of a thin film laser, processing an object where thin films made of different materials are stacked in multiple layers. The apparatus is configured to monitor the physical properties of the thin film, which is being processed in real-time to accurately stop the processing while completing the processing of the upper layer of the thin film, in order to minimize damage of the lower layer of the thin film and effectively select the upper layer of the thin film for removal.

Real-time measuring and machining system and method for controlling and monitoring machining thickness of thin film

A multiple beam path laser optical system using a multiple beam reflector. The multiple beam path laser optical system includes a light source part to generate a laser beam to be irradiated to a specimen, the multiple beam reflector to split a laser beam incident thereto from the light source part and to provide a plurality of optical paths, a main beam splitter to irradiate the laser beam split by the multiple beam reflector to the specimen, a transducer to excite the specimen for signal detection of the laser beam irradiated to the specimen, and a control part to analyze an interference pattern of a laser beam reflected from the specimen and recombined in the main beam splitter.

Multiple beam path laser optical system using multiple beam reflector

Transfer device and visual inspection system having the same

The present invention provides a laser optical system with multiple beam paths using the rear surface reflection of a beam splitter, wherein multiple samples can be inspected simultaneously in the same environment by generating the multiple beam paths in a single nondestructive inspection device According to the present invention, the laser optical system with multiple beam paths using the rear surface reflection of a beam splitter comprises: a light source part for generating a laser beam to be radiated on a sample; a multiple-beam splitter for splitting the laser beam coming from the light source part and providing the laser beam to the multiple beam paths; a main beam splitter for radiating the laser beam, which is split by the multiple-beam splitter, on multiple samples; a transducer for transducing a signal of the laser beam radiated on the sample; and a control part for analyzing the sample based on the signal of the transducer

Multiple beam path optical system using rear surface reflection of beam splitter

Provided are a laser processing apparatus capable of measuring a first focus position of an object to be processed by using a processing laser without a separate laser device for focus measurement, and a laser processing method using the same. The laser processing apparatus comprises a laser light source, a beam splitter, a first light focusing unit, and a beam profiler. The beam splitter splits a laser beam emitted from the laser light source into a reflected beam and a transmitted beam, and the first light focusing unit causes the transmitted beam to be focused on the object to be processed. The beam profiler receives the laser beam reflected by the object to be processed and passing through the first light focusing unit and the beam splitter, and measures the profile changes of the laser beam according to a change in position of the object to be processed.

Laser processing apparatus having focus measurement function and laser processing method

PURPOSE: A laser irradiation apparatus and an irradiation method thereof are provided to irradiate a laser to one glass on a moving stage using more than two laser optical devices. CONSTITUTION: Laser generating units(1a,1b) generate a laser beam. Two optical systems are composed of optical systems(3a,3b) which make the laser beam fired from the laser generating unit a certain size. A beam slit(5) has a certain pattern for selectively transmitting the laser beam fired from the optical system to glass(7). A moving stage(9) is carried to a cross direction or a longitudinal direction by a drive motor. A location perception unit(11) senses the location of the moving stage in real time. A controller(15) supplies a trigger control signal with a specific frequency to the laser generating unit according to the location of the moving stage.

Laser beam apparatus which uses more than 2 laser optical system and method thereof

Excimer laser annealing apparatus using multi laser beam

The present invention relates to a rotary micropattern marking device. The rotary micropattern marking device comprises: a laser device unit generating a laser beam; a shutter device unit installed in a rear end of the laser device unit; an attenuator device unit installed in a rear end of the shutter device unit; an energy meter device unit measuring energy of a laser beam; a mirror device unit installed in a rear end of the energy meter device unit; an interference optical system device unit; a rotary stage device unit installed in a rear end of the mirror device unit; and an XYZ stage device unit. According to the rotary micropattern marking device, the present invention can form a micropattern in a significantly short period of time.

Rotating type micro-pattern patterning equipment

The present invention relates to a roll to roll laser patterning device The device comprises: a laser patterning module (3); an unwinder module (1) capable of measuring a linear speed of a film (B); a first accumulator module (2) installed in a rear end of the unwinder module (1); a second accumulator module (4); an inspection and rewinder module (5); and a control unit (6) configured to operate and control the unwinder module (1), the first accumulator module (2), the laser patterning module (3), the second accumulator module (4), and the inspection and rewinder module (5) Therefore, the device can improve visibility and simplify processes

Roll to roll lazer patterning equipment

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Laser beam apparatus which uses more than 2 laser optical system and method thereof

Excimer laser annealing apparatus using multi laser beam

Rotating type micro-pattern patterning equipment

Roll to roll lazer patterning equipment