A simple, high yield method for the fabrication of cantilever with nano-silicon-tip by wet etching for atomic force microscopy (AFM) applications is described in this paper. The nano-silicon-tips with well controlled dimensions are fabricated by self-sharpening anisotropic wet etching technologies using a special pentagon etch mask design. The spring constant of the cantilever according to demand can be easily realized by changing the design of the etch mask and tuning the etching time in the fabrication process. A fabrication yield as high as 90 % has been realized for the AFM probes on 2 inch wafers. The height of tips on the cantilever is 10–15 μm, and the apex of each nano-silicon-tip typically has a radius of curvature of 5–10 nm. The cantilever’s spring constant can be well controlled within the range of 0.8–120 N m−1. The fabricated AFM probes are capable of generating high quality AFM image comparable with the commercial probes available in our lab.

Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications

Magneto-optic devices are a potential enabler of better scaling, transparent networks that are bit-rate, protocol and format insensitive. Transparency is critical given the paradigm shift from connection-oriented communications to IP-centric packet switched data traffic driven by the influx of high bandwidth applications. This is made more urgent by the large and growing optical-electronic bandwidth mismatch as well as the rapid approach of device dimensions to the quantum limit. Fiber-based switches utilizing bismuth-substituted iron garnets as Faraday rotators in Mach-Zehnder and Sagnac interferometer configurations are proposed, analyzed and characterized. The issues and limitations of these switches are investigated and efforts are undertaken to model and optimize the field generating coil impedance parameters. While alleviating the concerns associated with free-space switches and being compatible with contemporary optical networks, the performance of the fiber-based interferometric switches is still below theoretical limits and could be improved. Moreover, the discrete components of a fiber-based implementation engender scalability concerns. In keeping with the spirit of Richard Feynman's lectures, the maturity of planar lithographic techniques that are widely used in microelectronics is leveraged to realize integrated versions of the fiber-based interferometric switches. The design, analysis, fabrication and characterization of these integrated switches are detailed herein, including the selection of a suitable material system, design of the waveguide geometry, creation and calibration of a fabrication process based on direct-write scanning electron-beam lithography as well as determination of the switches’ fabrication tolerance.

https://lib.dr.iastate.edu/cgi/viewcontent.cgi?article=3494&context=etd

Interferometric switches for transparent networks : development and integration

A simple, high yield method for the fabrication of cantilever with nano-silicon-tip by wet etching for atomic force microscopy (AFM) applications is described in this paper The nano-silicon-tips with well controlled dimensions are fabricated by self-sharpening anisotropic wet etching technologies using a special pentagon etch mask design The spring constant of the cantilever according to demand can be easily realized by changing the design of the etch mask and tuning the etching time in the fabrication process A fabrication yield as high as 90 % has been realized for the AFM probes on 2 inch wafers The height of tips on the cantilever is 10-15 lm, and the apex of each nano-silicon-tip typically has a radius of curvature of 5-10 nm The cantilever's spring constant can be well controlled within the range of 08-120 N m -1  The fabri- cated AFM probes are capable of generating high quality AFM image comparable with the commercial probes available in our lab

Optical microelectromechanical systems (MEMS) technology or micro-optoelectromechanical systems (MOEMS)
technology has experienced rapid growth in recent years and find its application in modern telecommunications,
including fiber optics. This technology can provide high-performance features and new functionalities for optical and
communication systems. Therefore due to their widespread applications, MEMS variable optical attenuators (VOA) have
been one of the most attractive fiber optic components.

Electrostatic MEMS-based attenuator for optical communication

Nano iğnelerin üretimi, yüksek performanslı çok işlevli nano cihazların geliştirilmesinde artan endüstriyel taleplerden dolayı ilgi çekmektedir. Nano ölçekli uçlar kontrollü transdermal ilaç salımı, soğuk katot alan emisyonu, taramalı uç mikroskobu, yansıma önleyici kaplama ve nanoindentasyon uygulamalarında yaygın olarak kullanılmaktadır. Taramalı uç mikroskobu ailesinin bir üyesi olan Atomik kuvvet mikroskobu (AKM), 1980'lerden beri yüksek çözünürlüklü yüzey karakterizasyonu için yaygın olarak kullanılan güçlü bir araç haline geldi. AKM sensörü, esnek bir kuvvet algılayıcı konsoldan ve serbest ucunda nano ölçekli nanotipten oluşur. Yüksek çözünürlüklü AKM için nano-iğnenin eğrilik yarıçapı önem taşımaktadır. Islak aşındırma teknikleri ile AKM tip mikrofabrikasyonu düşük maliyet, kolay erişim ve (100) kristal düzleminde homojen aşındırma oranı gibi avantajları bulunaktadır. Bu çalışmada, litografi ve ıslak aşındırma gibi mikrofabrikasyon teknikleri kullanılarak silisyum nano uçlar üretilmiştir. Yüksek sivrilik ve en boy oranlı uçlara sahip olacak şekilde süreç optimize edilmiştir. Anizotropik ıslak aşındırma için Potasyum Hidroksit (KOH) ve Tetrametil Amonyum Hidroksit (TMAH) çözeltileri kullanılmıştır. Islak aşındırma işlemi için SiO2 maske kullanılmıştır. Değişik geometrilerde daha keskin nano iğneler elde edebilmek için litografi maske geometrisi ve açıları optimize edilmiştir. Çalışma neticesinde yüksek en boy oranına sahip nano iğneler, kare piramit geometrili ve asimetrik beşgen piramit geometrili nano iğneler üretilebilmiştir.

/pdf/kontrollu-silisyum-nano-ignelerin-mikrofabrikasyonu-ewjtfw1d.pdf

Kontrollü Silisyum Nano-İğnelerin Mikrofabrikasyonu

As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM), we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips with well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in the fabrication process. The tips on the cantilever, with 1.2 ?m height, have a high aspect ratio of 7:1. This nanotip on the cantilevers can not only be used as an AFM probe, it can also be extended to any two-dimensional nanotip arrays to be widely used in biomedical field such as biomedical specimen micro-extractions and transportations.

Fabrication of novel cantilever with nanotip for AFM applications

A MEMS (micro-electromechanical systems) reflection-type dualfunction-integrated optical device is proposed. The device employs the compound in-plane and out-of-plane motion of a dual-slope mirror, which is driven by electrostatic actuators, to operate as optical switch and variable optical attenuator, independently. The MEMS-based dualfunctional devices can minimize the overall system size and weight, reduce external interconnections between individual devices, while at the same time maximize system information capacity, optical throughput, flexibility and reliability. Measurements of the MEMS-based dualfunctional devices show that the switching time is less than 9 ms, the excess loss is less than 3 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation range.

Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks

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Fabrication of novel cantilever with nanotip for AFM applications

Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks