The utility model relates to a wedge-structure precision positioning lifting platform on semiconductor processing equipment. The precise positioning lifting platform of the wedge-shaped structure comprises an L-shaped base, two parallel horizontal linear guide rails are mounted on the inner side of a horizontal plate of the L-shaped base, two parallel vertical linear guide rails are arranged on the inner side of a vertical plate of the L-shaped base, a wedge block is arranged on the horizontal linear guide rails through a sliding block, an inverted-wedge-shaped workbench is arranged on an inclined face of the wedge block, and a vertical face of the inverted-wedge-shaped workbench is in contact with the vertical linear guide rails. By adoption of the creative wedge-shaped structure of the technical scheme in the utility model, the positioning lifting platform is small and compact, can achieve high-precision vertical positioning, and has a relatively large vertical stroke.

Wedge-structure precision positioning lifting platform on semiconductor processing equipment

The invention discloses an inchworm-imitating piezoelectric rotary driver, which comprises output shafts, clamping and pretightening bolts, clamping and pretightening rings, restoring springs, annular clamping piezoelectric stacks, driving piezoelectric stack holders, driving arms, driving piezoelectric stacks, driving and pretightening blocks, driving and pretightening bolts and a base; the characteristic of rack-gear transmission is imitated by the driving piezoelectric stacks and the driving arms, one end of each driving piezoelectric stack is machined into the shape of the rack tooth profile, the surface of each driving arm, which is in contact with the driving piezoelectric stack, is machined into the shape of the gear involute profile, and such contact surfaces ensure that the driving units do not have motion interference, so that driving is more accurate; the annular clamping piezoelectric stacks are adopted as clamping units, rotational clamping is realized by extending both ends of each annular clamping piezoelectric stack and utilizing the static friction force between the planes, the clamping area is large, moreover, the contact between the clamping surfaces is sufficient, and high-precision and high-load output can be realized.

Inchworm-imitating piezoelectric rotary driver

The invention relates to a micro-nano simulation rotating drive device, which belongs to the precise and super-precise machining field. The micro-nano simulation rotating drive device mainly consists of a stator and a rotor, wherein a drive piezoelectric stack is encapsulated inside the stator; and the rotor is a variable-type interface shaft. A high-precision piezoelectric drive device is used for driving a lever amplification flexible hinge structure to perform associated clamping, and the stepper super-precision rotation movement for the rotor to rotate along a fixed shaft is realized by controlling the clamping sequence of a piezoelectric clamping mechanism in the stator. The micro-nano simulation rotating drive device can be used for the high-precision drive and machining field, and has advantages of less investment, low cost, fast effect, high benefit and the like. The micro-nano simulation rotating drive device is a piezoelectric single-degree-of-freedom precision rotating drive device which can improve the system micro precision and reduce the structural size and can make super-precision stepper rotation movement along a determined direction.

Micro-nano simulation rotating drive device

The invention discloses a two-freedom-degree rotation-line motion micro ultrasonic motor based on a piezoelectric cylinder The motor comprises a piezoelectricity driver stator, a shaft, a motion guide device, an elastic pre-pressure device and a drive power supply, wherein the piezoelectricity driver stator comprises the piezoelectric cylinder, an annular meta end cap is respectively attached to two ends of the piezoelectric cylinder, the motion guide device comprises a rotation-line motion bearing and a base, the shaft penetrates into the piezoelectric cylinder and is limited by the motion guide device to do a rotary or linear motion, the annular metal end caps are pressed on the shaft, and the elastic friction contact of the piezoelectric cylinder and the shaft is achieved under the pre-pressure action The invention provides a two-freedom-degree rotation-line drive mechanism which is compact in structure The motor is simple in structure, small in size and wide in application prospects

Two-freedom-degree rotation-line motion micro ultrasonic motor

Inchworm type multi-degree of freedom piezoelectric driving device

Multi-degree-of-freedom bionic piezoelectric driver

Multi-degree-of-freedom micronano-level bionic precision rotary driver

The utility model relates to a micro/nano-scale bionic rotation driving device, which belongs to field of precision and ultraprecision machining. The micro/nano-scale bionic rotation driving device is mainly composed of a stator and a rotor, wherein a drive piezoelectric stack is packaged in the stator; and the rotor is a variable interface shaft. The micro/nano-scale bionic rotation driving device can realize the stepwise ultraprecision rotation movement of the rotor around a fixed shaft by using a high-precision piezoelectric driver to drive a level amplification flexible hinge structure to perform related clamping operation and by controlling the clamping sequence of a piezoelectric clamping mechanism in the stator. The micro/nano-scale bionic rotation driving device provided by the utility model can be used in the fields of high-precision driving and processing, and has the advantages of less investment, low cost, quick effectiveness, high benefit and so on. The utility model is a piezoelectric single-degree-of-freedom precision rotation driver capable of improving the system micro-precision and reducing the structure size, and capable of realizing ultraprecision stepwise rotation movement around a determined direction.

Micro/nano-scale bionic rotation driving device

Ultraprecise piezoelectric stepping rotation driving platform capable of regulating speed mechanically

Handle everyday research tasks with reliable, citation-backed results

Your personal Research Agent to handle research tasks with citation-backed results

Popular Tasks used by Researchers

How can I help with your research?

Meet SciSpace

Get more enhanced response by uploading the PDFs you want me to reference.

No relevant PDFs in your library

SciSpace is the AI research assistant for academics. Run systematic literature reviews on 280M+ papers, and write papers with cited sources. Trusted by 1M+ students, PhDs & researchers.

SciSpace | AI for Research

Analyze PDFs

Code & Manuscripts

Funding & Grants

Literature & Patents

Medical & Clinical Data

Systematic Review

Visualize & Present

Web & Data

Build a Google Scholar-like website for your research.

Build a website

Create charts and images for your research

Create a Chart

Write a paper for submission to a journal

Draft a manuscript

Patent Search

Design eye-catching scientific posters in minutes.

Scientific Poster Generation

Systematic Literature Review

One task is running at the moment. Your messages will be shown right after.

Drag and drop or click here to browse

Loved by <highlight>1 million+</highlight> researchers

Extract a list of specific topics and their sources from unstructured text

Topics

Compare and analyze relevant papers that matches with your search

Papers

Get insights from PDFs and bookmarked papers from your library

My library

Recent searches

Try searching for:

Catch AI-generated content in scholarly and non-scholarly content

{ai} Detector

Ai Writer

Get PDF Summaries, highlighted text explanations 

Chat with PDF

Effortlessly create in-text citations and bibliographies in APA and 2,500 other formats

Citation generator

Get explanations, summaries, and answers on academic papers

Ease up your research workflow with {scispace}'s cohort of exciting AI tools

Elevate your academic writing skills and convey your ideas the way you want

Paraphraser

Explore our range of reading and writing tools

Your file is being prepared and should be ready in a few minutes. If it's a large file, it might take a bit longer. You can close this window, and we'll email you the file when it's done.

You have reached a maximum limit of <strong>{limit}</strong> columns in the table. Remove at least <strong>1</strong> column to add or create another one.

Li Jianping

Author Tools

Chat about Author