The invention relates to a bionic antenna and thermal expansion based macroscopical-microcosmic driving rotary platform, and belongs to the precision driving field. A macro piezoelectric driving unit performs clockwise macroscopic driving for a columnar rotary body through enveloping type flexible hinges and the elastic deformation of bionic wedge-shaped antennas; a microcosmic thermal expansion driving unit generates controllable thermal expansion deformation in intermittent places of the bionic wedge-shaped antennas through thermal conduction of a high-temperature ceramic heating rod so as to further drive the antennas to perform micro linear displacement to realize the microcosmic driving of the columnar rotary body; the columnar rotary body is embedded in the rotary body of a ceramic ball bearing in an interference fit manner, and a rigid planar reflective plate is mounted in the groove of the rotary body in an embedding manner; and the rigid planar reflective plate is used for a non-contact type optical displacement measurement system to perform quantitative detection on the rotary deformation of the columnar rotary body. The macroscopical-microcosmic driving rotary platform has the advantages of compact structure and capability of satisfying the requirements of the fields, such as micro-nano operation, micro-nano machining, precision optics, spaceflight and medical engineering and the like, on the micro-nano-level precision driving and positioning.

Bionic antenna and thermal expansion based macroscopical-microcosmic driving rotary platform

The invention relates to an in-situ micro-nano indentation/scratch test platform and a test method, and belongs to the field of electromechanical integrated precision scientific instruments. An X axis precision scratch unit and a Y axis large-stroke stick-slip drive scratch assembly are assembled at the tail of a base, a Z axis macro-movement adjusting mechanism is assembled at the middle of the base, a motor driving unit is assembled at the head of the base, a precision pressing driving and displacement signal detecting unit is installed on the Z axis macro-movement adjusting mechanism, and a precision three-axis force sensor used for detecting an indentation pressing force and a normal force and a tangential force of a scratch is installed on the X axis precision scratch unit. The in-situ micro-nano indentation/scratch test platform has the advantages of compact structure, miniaturization, integration, and capability of better ensuring the assembly precision, effectively improving the overall rigidity and dynamic properties and improving the overall test precision while overcoming the defect that an existing test platform cannot be used for quantitatively detecting the normal force and the tangential force in a scratch process.

In-situ micro-nano indentation/scratch test platform and test method

The invention relates to a stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform and the linear motion along the x and y direction and the rotating motion around the z axis direction can be implemented. The stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform comprises a lower layer of x axis linear driver assembly, a middle layer of y axis linear driver assembly and an upper layer of z axis rotating driver assembly which are connected in turn and sawtooth waves are input towards piezoelectric stacks based on the stick-slip inertia principle to implement the stepping type continuous feeding of an output terminal. The symmetry and the frequency of the sawtooth waves are changed to change the feeding direction and speed. The positioning motion of the rapid feeding positioning and the precise feed positioning can be implemented through different modes of control on the piezoelectric stacks and accordingly the rapid and high precision positioning can be obtained simultaneously. The stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform has the advantages of being small and compact in structure, large in output stroke, adjustable in speed, large in bearing capacity, stable and reliable in work, good in repeatability and suitable for large stroke of precision motion control occasions with strict space size constraints.

Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform

Provided are an oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment device, an oblique-trapezoid stator and an oblique-trapezoid rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, lateral displacement is produced by means of nonuniform axial rigidity distribution of a semicircular drive foot, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the linear piezoelectric motor is significantly improved. The oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.

Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof

The invention provides a precise piezoelectric stick-slip linear motor with an asymmetric structure and a driving method thereof, and aims at solving the problem that mechanical output characteristics of an existing piezoelectric stick-slip linear motor are limited due to the fact that comprehensive regulation of friction is difficult and other problems. The precise piezoelectric stick-slip linear motor is composed of a fixed support, a loading mechanism, a stator and a rotor, and lateral displacement of the stator is produced by means of an asymmetric flexible hinge structure, so that friction driving force is increased, and friction resistance is reduced; meanwhile, a friction regulation wave is complexly superimposed in a sawtooth driving wave in the rapid deformation stage of the stator, therefore, the friction resistance between the stator and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction is achieved, and the mechanical output characteristics of the piezoelectric stick-slip linear motor are significantly improved. The precise piezoelectric stick-slip linear motor with the asymmetric structure has the advantages of being simple in structure, high in precision, large in stroke and the like and has good application prospects in the fields of micro-nano precision driving and positioning of aerospace, optical precision instruments, semiconductor machining and the like.

Precise piezoelectric stick-slip linear motor with asymmetric structure and driving method thereof

The utility model relates to a positive pressure adjustable micro nano stick slip inertia drive platform, and relates to precision and ultra precision machining, micro nano operation robots, micro electro mechanical systems, large-scale integrated circuit manufacturing, biotechnology and other important fields of science and engineering. The device is mainly composed of a positive pressure adjustable precision drive unit and a linear motion unit. The precision drive unit is composed of a manual precision translation stage and a piezoelectric driver. The manual precision translation stage can adjust the positive pressure between the piezoelectric driver and a workbench. Piezoelectric stack is packaged in the piezoelectric driver. The linear stepping feeding of the workbench is realized based on a stick slip principle. The linear motion unit is composed of a precision rolling guide and a workbench, and the linear motion of the worktable is ensured. The positive pressure adjustable micro nano stick slip inertia drive platform provided by the utility model can be used for the fields of high precision drive and machining, large-scale integrated circuits and micro operation robots, and has the advantages of simple structure, stable work, high efficiency, less investment, high benefit and the like.

Positive pressure adjustable micro nano stick slip inertia drive platform

The utility model relates to a tensile testing machine clamping device suitable for a plate-shaped specimen and belongs to the technical field of high-end manufacturing equipment industry and material testing machines. The tensile testing machine clamping device comprises a worm and gear shrinkage mechanism, a connecting rod amplification mechanism and a wedge-shaped clamping mechanism, wherein the worm and gear shrinkage mechanism drives the connecting rods on two sides to shrink by adopting a special worm gear with a bidirectional internal thread; and the wedge-shaped clamping block is pushed to move downwards through the connecting rod amplification mechanism, and finally an effect of clamping the specimen is achieved. Meanwhile, the tensile testing machine clamping device has an amplification principle of the connecting rod mechanism and a self-locking effect of the wedge-shaped mechanism, and firm tensile clamping force can be guaranteed. The tensile testing machine clamping device has the advantages that the device is compact in structure, adopts an automatic centering and clamping mode and can be suitable for tensile testing of plate-shaped specimens with the thickness of 0.5-5mm. The connecting rod is pushed by adopting the special worm gear mechanism with the bidirectional internal thread, the fastening torque can be further magnified, and more reliable connecting and self-locking performance is provided.

Tensile testing machine clamping device suitable for plate-shaped specimen

The utility model relates to a micro-nano bionic piezoelectric rotating driving device, and belongs to the fields of precision machining, precision positioning and precision driving. The micro-nano bionic piezoelectric rotating driving device mainly comprises a stator, a rotor and a housing. Flexible hinge structures are arranged in the rotor to package driving piezoelectric stacks and clamping piezoelectric stacks. A mode of clamping inside the rotor is adopted, the rotor is provided with an interface rotating shaft and can be connected to an external load. According to the utility model, the flexible clamping hinge structure is driven by a high-precision piezoelectric actuator for relevant clamping, and the clamping sequence of a piezoelectric clamping mechanism in the rotor is controlled to realize stepwise ultra-precision rotating movement of the rotor around a fixed shaft. The micro-nano bionic piezoelectric rotating driving device has the advantages of quick response, large driving force, high stability, low energy loss, high resolution, high displacement accuracy, low driving power, wide working frequency range, no creep, low cost, low investment, high benefit and the like, the structural complexity and size are reduced; and magnetic field interference can be avoided. The micro-nano bionic piezoelectric rotating driving device is high in practicality.

Micro-nano bionic piezoelectric rotating driving device

The invention relates to a cross-scale micro-nano-scale in-situ shearing mechanical performance testing platform, belonging to the field of in-situ shearing mechanical performance tests. The cross-scale micro-nano-scale in-situ shearing mechanical performance testing platform structurally comprises a precise driving unit, a transmission and execution unit, a signal control and detection unit and a connecting and supporting unit, wherein a brushless direct current servo motor is connected with a primary worm, is connected with a secondary worm shaft by a primary worm and gear transmission pair, and then is connected with a precision ball screw I by a secondary worm and gear transmission pair. The cross-scale micro-nano-scale in-situ shearing mechanical performance testing platform has the advantages of being small in size, light in weight, high in rigidity, compact in structure and high in testing precision, and being capable of providing rich testing contents, and being compatible with carrying platforms of vacuum cavities of various electron microscopes, thereby providing novel testing measures for analytical investigation of a material deformation damage mechanism under an approximate serving condition.

Cross-scale micro-nano-scale in-situ shearing mechanical performance testing platform

The utility model relates to a micro-nano level bionic multi-degree-of-freedom driving device and belongs to the field of precision and ultra-precision machining. The micro-nano level bionic multi-degree-of-freedom driving device mainly comprises a stator, a rotor and an output shaft, wherein a rotary driving mechanism and a linear driving mechanism are connected to the rotor; and the output shaft is a variable interface rotating shaft. According to the micro-nano level bionic multi-degree-of-freedom driving device disclosed by the utility model, a flexible hinge structure is driven by a high-precision piezoelectric actuator for relevant clamping; the stepped ultra-precision rotating motion of the rotor around a fixing shaft is realized by controlling piezoelectric clamping mechanisms in an upper layer and a lower layer of the rotor and a piezoelectric driving mechanism connected onto the lower layer; and meanwhile, the linear stepped movement along the orientation is realized by controlling flexible hinge mechanisms connected onto the upper layer and the lower layer of the rotor. The micro-nano level bionic multi-degree-of-freedom driving device disclosed by the utility model can be applied to the field of high-precision driving and processing and has the advantages of less investment, low cost, quick response and high benefit. The ultra-precision stepped rotating motion around the orientation and the linear stepped motion along the orientation can be realized.

Micro-nano level bionic multi-degree-of-freedom driving device

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