Li Guo
Fudan University
1 Papers
Li Guo is an academic researcher from Fudan University. The author has contributed to research in topics: Thin film & Oxide. The author has an hindex of 1, co-authored 1 publications.
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Papers
Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition
TL;DR: In this paper, the influence of Al content on the structure, optical, and electrical properties of AZO films was investigated, and the X-ray diffraction spectra revealed that the grown ZnAlO films have a hexagonal structure with a preferential c-axis orientation perpendicular to the substrate surface.
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