21 Papers
209 Citations
L. Soukup is an academic researcher from Academy of Sciences of the Czech Republic. The author has contributed to research in topics: Plasma & Thin film. The author has an hindex of 11, co-authored 21 publications.
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Papers
Cu3N films prepared by the low-pressure r.f. supersonic plasma jet reactor: Structure and optical properties
František Fendrych,L. Soukup,Lubomir Jastrabik,Miloš Šícha,Miloš Šícha,Z. Hubička,Z. Hubička,Dagmar Chvostova,Alexander Tarasenko,V. Studnička,T. Wagner +10 more
TL;DR: In this paper, a low-pressure r.f. supersonic plasma jet reactor (RPJ) was used for deposition of Cu3N thin films and the typical value of the deposition growth rate was found to be in the order of 16nm−min−1 for r. f. power Pw≈40 W.
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Germanium nitride layers prepared by supersonic r.f. plasma jet
L. Soukup,Vratislav Peřina,Lubomir Jastrabik,Miloš Šícha,Petr Pokorný,Rodney J. Soukup,M. Novák,J. Zemek +7 more
TL;DR: Rutherford backscattering spectroscopy (RBS) and X-ray photoelectron spectroscopic (XPS) have been used to characterize GexNy films grown on Si substrates as mentioned in this paper.
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A Study of the Gas Flow in the RF Low-Pressure Supersonic Jet Plasma Chemical System
Milan Tichý,Miloš Šícha,L Bardos,L. Soukup,Lubomir Jastrabik,K. Kapoun,J. Touš,Z. Mazanec,Rodney J. Soukup +8 more
TL;DR: In this paper, the experimental study of the gas flow in the RF low-pressure supersonic-jet plasma-chemical reactor was conducted by using photography with subsequent digital picture processing.
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Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge
A. Churpita,Zdeněk Hubička,Martin Cada,Dagmar Chvostova,L. Soukup,Lubomir Jastrabik,P. Ptáček +6 more
TL;DR: Barrier torch discharge was used for low temperature deposition of In x O y and SnO x thin films at atmospheric pressure on polymer substrates as discussed by the authors, which showed that the films had chemical composition close to SnO 2 and In 2 O 3, respectively.
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The mechanical and tribological properties of magnetron sputtered Ti–C:H coatings
V. Kulikovsky,František Fendrych,Lubomir Jastrabik,Dagmar Chvostova,L. Soukup,J Pridal,F. Franc +6 more
TL;DR: In this article, a correlation between the growth parameters of diamond-like coatings with small amounts of titanium was determined by DC magnetron sputtering of a titanium target in CH 4 +Ar gas mixture and their mechanical and tribological properties.
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