L. Massa
Delft University of Technology
2 Papers
27 Citations
L. Massa is an academic researcher from Delft University of Technology. The author has contributed to research in topics: Energy level splitting & Oxide. The author has an hindex of 2, co-authored 2 publications.
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Papers
Quantum Transport Properties of Industrial Si 28 / Si O 2 28
D. Sabbagh,Nicole K. Thomas,Jessica M. Torres,R. Pillarisetty,Payam Amin,Hubert C. George,Singh Kanwaljit,A. Budrevich,M. Robinson,D. Merrill,L. Ross,Jeanette M. Roberts,Lester Lampert,L. Massa,S.V. Amitonov,J.M. Boter,G. Droulers,H. G. J. Eenink,M. van Hezel,D. Donelson,Menno Veldhorst,Lieven M. K. Vandersypen,James S. Clarke,Giordano Scappucci +23 more
TL;DR: The structural and quantum transport properties of isotopically enriched Si28/SiO228 stacks deposited on 300mm Si wafers in an industrial CMOS fab were investigated in this article.
Quantum transport properties of industrial $^{28}$Si/$^{28}$SiO$_2$.
D. Sabbagh,Nicole K. Thomas,Jessica M. Torres,R. Pillarisetty,Payam Amin,Hubert C. George,Singh Kanwaljit,A. Budrevich,Max Robinson,D. Merrill,L. Ross,J.S. Roberts,Lester Lampert,L. Massa,S.V. Amitonov,J.M. Boter,G. Droulers,H. G. J. Eenink,M. van Hezel,D. Donelson,Menno Veldhorst,Lieven M. K. Vandersypen,James S. Clarke,Giordano Scappucci +23 more
TL;DR: The structural and quantum transport properties of isotopically enriched stacks deposited on 300 mm Si wafers in an industrial CMOS fab were investigated in this paper, where highly uniform films with an isotopic purity greater than 99.92% were obtained with an equivalent oxide thickness of 17 nm.