The particle-in-cell/Monte Carlo collisions (PIC/MCC) simulation approach has become a standard and well-established tool in studies of capacitively coupled radio frequency (RF) plasmas. While code-to-code benchmarks have been performed in some cases, systematic experimental validations of such simulations are rare. In this work, a multi-diagnostic experimental validation of 1d3v electrostatic PIC/MCC simulation results is performed in argon gas at pressures ranging from 1 Pa to 100 Pa and at RF (13.56 MHz) voltage amplitudes between 150 V and 350 V using a custom built geometrically symmetric reference reactor. The gas temperature, the electron density, the spatio-temporal electron impact excitation dynamics, and the ion flux-energy distribution at the grounded electrode are measured. In the simulations, the gas temperature and the electrode surface coefficients for secondary electron emission and electron reflection are input parameters. Experimentally, the gas temperature is found to increase significantly beyond room temperature as a function of pressure, whereas constant values for the gas temperature are typically assumed in simulations. The computational results are found to be sensitive to the gas temperature and to the choice of surface coefficients, especially at low pressures, at which non-local kinetic effects are prominent. By adjusting these input parameters to specific values, a good quantitative agreement between all measured and computationally obtained plasma parameters is achieved. If the gas temperature is known, surface coefficients for different electrode materials can be determined in this way by computationally assisted diagnostics. The results show, that PIC/MCC simulations can describe experiments correctly, if appropriate values for the gas temperature and surface coefficients are used. Otherwise significant deviations can occur.

https://iopscience.iop.org/article/10.1088/1361-6595/ac2222/pdf

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

Low-temperature plasma-processing technologies are essential for material synthesis and device fabrication. Not only the utilization but also the development of plasma-related products and services requires an understanding of the multiscale hierarchies of complex behaviors of plasma-related phenomena, including plasma generation in physics and chemistry, transport of energy and mass through the sheath region, and morphology- and geometry-dependent surface reactions. Low-temperature plasma science and technology play a pivotal role in the exploration of new applications and in the development and control of plasma-processing methods. Presently, science-based and data-driven approaches to control systems are progressing with the state-of-the-art deep learning, machine learning, and artificial intelligence. In this review, researchers in material science and plasma processing, review and discuss the requirements and challenges of research and development in these fields. In particular, the prediction of plasma parameters and the discovery of processing recipes are asserted by outlining the emerging science-based, data-driven approaches, which are called plasma informatics.

https://iopscience.iop.org/article/10.35848/1347-4065/ac9189/pdf

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Effect of an inhomogeneous electron density profile on the transmission microwave frequency spectrum of the cutoff probe

PETERSON, DAVID JOHN. Characterization of Intermediate Pressure Plasmas with Advanced Microwave Resonator Diagnostics. (Under the direction of Steven C. Shannon.) Intermediate pressure plasmas (1-100 Torr) are an area of growing academic and industrial interest for a number of different applications. Accurate measurement of plasma parameters is often challenging at these conditions. Most plasma diagnostics rely on interactions with either charged particles or excited species present in a discharge. As pressure increases, collisions with neutral gas particles can act to distort many measurements in a manner that is difficult to recover from. Microwave diagnostics offer a complementary approach to the suite of diagnostics necessary to fully characterize a plasma, one that is particularly well suited to making measurements at intermediate pressures. Specifically, the similarity of a microwave period and mean time between electron-neutral collisions allows microwave diagnostics to obtain additional information from a measurement that would otherwise be either unobtainable or deleterious to the measurement itself. This work uses an array of diagnostics to characterize both radiofrequency capacitively coupled plasmas and microwave surface-wave plasmas at low and intermediate pressures. The primary focus is developing an understanding of the general characteristics of these discharges and also to develop the measurement capabilities of a microwave diagnostic known as the hairpin resonator probe. In particular, mean electron energy can be measured by the probe through the complex plasma permittivity. This work aims to demonstrate the usefulness of the technique and understand the associated experimental limitations. Experiments are performed in radiofrequency capacitively coupled plasmas for pressures ranging from 0.01 Torr to 4.5 Torr and electron densities (ne ) spanning 1×108-2×1010 cm−3 in argon, helium, nitrogen, argon-helium mixtures, and argon-oxygen mixtures. Measurements are primarily made with the hairpin resonator probe. Results are compared to fluid and hybrid simulations and generally show good agreement with a number of notable discrepancies. Potential sources of simulation-model disagreement are discussed and in some cases quantified. Experiments are also performed in a microwave surface-wave discharge using an array of diagnostics, including a hairpin resonator probe, Langmuir probe, laser absorption spectroscopy, and optical emission spectroscopy. Conditions span pressures ranging from 0.2-6 Torr and ne spanning 1×108-2×1011 cm−3 in argon. All results are compared to at least one other diagnostic, all showing good qualitative agreement and in most cases decent quantitative agreement. © Copyright 2020 by David John Peterson

Characterization of Intermediate Pressure Plasmas with Advanced Microwave Resonator Diagnostics.

https://robots.iopscience.iop.org/article/10.1088/1361-6463/ab6944/pdf

Radiofrequency phase resolved electron density measurements with the hairpin resonator probe

In situ plasma diagnostics present the classical problem of the scientific measurement: how does one accurately measure a system without also perturbing it? The uncertainty in the degree of perturbation then reflects an inherent uncertainty in the diagnostic results. Microwave probes are no exception. This work discusses an experimental methodology for quantifying the local perturbation in hairpin resonator probe measurements. By pulsing the delivered power to a plasma, an electron density hairpin spike (HS) is readily detected at generator shutoff. The phenomenon is understood to arise from an apparent density rise as the plasma sheath collapses, thus raising the spatially averaged density measured between the hairpin tines. Other explanations for the density rise are eliminated, and the utility of the HS is presented. Under the conditions investigated, the HS provides an experimental comparison to a previous sheath correction factor developed by Sands et al.

Measurement of localized plasma perturbation with hairpin resonator probes

/pdf/model-experiment-comparison-of-radiofrequency-phase-resolved-2mul20um6e.pdf

Model-experiment comparison of radiofrequency phase resolved plasma parameters for moderate pressure capacitively coupled discharges

Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma

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Papers

Measurement of localized plasma perturbation with hairpin resonator probes

Radiofrequency phase resolved electron density measurements with the hairpin resonator probe

Model-experiment comparison of radiofrequency phase resolved plasma parameters for moderate pressure capacitively coupled discharges

Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma