A monolithically fabricated apodized a-Si:H grating coupler with metal mirror was demonstrated. The minimum groove length for the apodized grating was more than 100 nm and measured coupling efficiency was 70%.

http://ieeexplore.ieee.org/iel7/7592593/7718173/07718393.pdf

Highly efficient circular holes added a-Si:H grating coupler with metal mirror for 3D optical interconnects

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Highly efficient circular holes added a-Si:H grating coupler with metal mirror for 3D optical interconnects