This paper surveys contact micromanipulation strategies that are developed to tackle the microscale-related phenomena in microassembly. Strategies are divided according to how they take account of adhesion forces. Micromanipulation refers to handling of objects that have dimensions below hundreds of micrometers with handling accuracy down to submicrometers. The line between micro- and nanomanipulation is not definite but typically the object size in nanomanipulation is considered to reach from atomic and molecular scale to hundreds of nanometers. In contact micromanipulation, the tool physically touches the manipulated objects during handling. Scaling-effect-induced adhesion forces severely complicate micromanipulation when compared to conventional macromanipulation. At microscale, the most important adhesive forces are van der Waals force, electrostatic force, and capillary force. Adhesion forces are also the reason behind the fairly low level of automation in microassembly systems. Improved success rate of micromanipulation operations requires that the special features of microscale phenomena be taken into consideration.

Contact Micromanipulation—Survey of Strategies

This paper deals with an overview of recent microgrippers. As the end-effectors of micromanipulation systems, microgrippers are crucial point of such systems for their efficiency and their reliability. The performances of current microgrippers are presented and offer a stroke extending from 50mum to approximately 2 mm and a maximum forces varying from 0.1 mN to 600 mN. Then, micromanipulation system based on a piezoelectric microgripper and a SCARA robot is presented

/pdf/overview-of-microgrippers-and-design-of-a-micromanipulation-65cnhnstbi.pdf

Overview of Microgrippers and Design of a Micromanipulation Station Based on a MMOC Microgripper

This paper presents the development of a microgripper for micro-assembly and micro-operation applications. Two design configurations for a silicon-based microgripper with integrated thermal expansion actuator and microsensor were proposed and studied in this work. The opening distance of the microgripper is up to 120 µm. The microgripper is designed to operate through an integrated thermal or piezoelectric element that is controlled by an electricity supply. Piezoresistive sensors are integrated on the micromachined gripper to detect and feedback the gripping force applied on gripped objects. The two proposed configurations for the microgripper were simulated numerically and compared with one another. The thermal dynamic response of the thermal expansion element was, in particular, studied through finite-element modelling. Finally, a stainless steel prototype of the designed microgripper was fabricated and tested.

http://iopscience.iop.org/article/10.1088/0964-1726/8/5/312/pdf

A micromachined thermally-driven gripper: a numerical and experimental study

We present a way to fabricate microgrippers that can meet the industry's needs well, i.e., low cost and large tip deflection, etc. The microgripper is fabricated by bonding two identical micro NiTi-Si cantilever beams together with a silicon spacer in between. It can be actuated by electrical current directly. We have tested the behavior of micro NiTi-Si cantilever beams of three different sizes, and compared that with our simulation results. According to our simulation, the maximum strain and the maximum stress in NiTi should enable the grippers to survive after 106 cycles. Due to the simple fabrication process, this design is very suitable for batch production at low cost, which is a significant advantage in both medical and manufacturing industries

Design, testing, and simulation of NiTi shape-memory-alloy thin-film-based microgrippers

A micro-gripper actuated by laser power has been developed. The laser-powered micro-gripper is designed for handing micro-objects in very narrow space or overly crowded places, consists of a laser-powered linear actuator and a photoformed micro-gripper. This linear actuator's maximum output power was 2.3 mN and the stroke length was 900 /spl mu/m, and the total dimension of the linear actuator is about 25 mm in length and 2 mm in diameter.

A laser-powered micro-gripper

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A laser-powered micro-gripper