K. Gabel
University of Central Florida
11 Papers
158 Citations
K. Gabel is an academic researcher from University of Central Florida. The author has contributed to research in topics: Laser & Lithography. The author has an hindex of 6, co-authored 11 publications.
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Papers
Patent
Water laser plasma x-ray point source and apparatus
Martin Richardson,Masataka Kado,K. Gabel,Feng Jin +3 more
- 01 Apr 1994
TL;DR: In this article, a high repetition-rate laser plasma target source system and lithography system is described, which consists in a preferred embodiment of a liquid tank source and freezer which freezes microscopic particles into crystal shapes which are projected by a nozzle jet from a high- repetition rate liquid-droplet injector into the path of a flashing laser beam, which results in producing soft x-rays of approximately 13 nm.
X-ray focusing with lobster-eye optics: a comparison of theory with experiment
Andrew G. Peele,Keith A. Nugent,Andrei Rode,K. Gabel,Martin Richardson,Richard R. Strack,Walter P. Siegmund +6 more
TL;DR: An experimental investigation and comparison with simulation of the x-ray focusing of a flat, square profile microchannel plate using x rays from a laser-produced plasma finds the focal structure to be consistent with theoretical expectations.
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Patent
Water laser plasma x-ray point sources
Martin Richardson,Masataka Kado,K. Gabel,Feng Jin +3 more
- 13 Jan 1995
TL;DR: In this article, a high repetition-rate laser plasma target source system was proposed, where ice crystals are irradiated by a laser and lithography system, which results in soft x-rays of approximately 11.7 nm and 13 nm.
Ultrafast semiconductor laser-diode-seeded Cr:LiSAF regenerative amplifier system
Peter J. Delfyett,Alex Yusim,Steve E. Grantham,Sangyoun Gee,K. Gabel,Martin Richardson,G.A. Alphonse,John Connolly +7 more
TL;DR: An ultrafast hybrid mode-locked semiconductor laser-diode system has been used to seed a flash-lamp-pumped Cr:LiSAF regenerative amplifier system, producing sub-picosecond pulses with millijoule output pulse energy as discussed by the authors.
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Mass-limited laser-plasma cryogenic target for 13 nm point x ray sources for lithography
Feng Jin,K. Gabel,Martin Richardson,Masataka Kado,Andrew F. Vasil'ev,Daniel Salzmann +5 more
- 01 Feb 1994
TL;DR: In this article, the authors proposed the use of mass-limited, line emitting cryogenic targets for SXPL, which permit a continuous supply of targets without the problem of particulate debris and excessive heating of multilayer optics by an intense x-ray flux in wavelength regions outside the multillayer bandwidth.
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