Justin Mauck
Hitachi
30 Papers
256 Citations
Justin Mauck is an academic researcher from Hitachi. The author has contributed to research in topics: Substrate (printing) & Enclosure. The author has an hindex of 10, co-authored 30 publications. Previous affiliations of Justin Mauck include Applied Materials.
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Papers
Patent
Gas Enclosure Assembly and System
Justin Mauck,Alexander Sou-Kang Ko,Eliyahu Vronsky,Shandon Alderson +3 more
- 19 Dec 2012
TL;DR: The present teachings relate to various embodiment of an hermetically-sealed gas enclosure assembly and system that can be readily transportable and assemblable and provide for maintaining a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein this paper.
51
Patent
Deterioration resistant chambers for inductively coupled plasma production
Juan Jose Gonzalez,Steve Dillon,Andrew Shabalin,Justin Mauck,Fernando Gustavo Tomasel +4 more
- 25 Feb 2003
TL;DR: In this article, the authors proposed a method to construct plasma chambers with improved wall resistance to deterioration, where a chamber is made of an aluminum alloy having low concentrations of elements that form non-soluble, intermetallic particles to address coating/substrate issues.
26
Patent
Low-particle gas enclosure systems and methods
Justin Mauck,Alexander Sou-Kang Ko,Eliyahu Vronsky,Shandon Alderson,Alexey Stepanov +4 more
- 12 May 2014
TL;DR: The present teachings relate to various embodiments of a gas enclosure system that can have various components comprising a particle control system that provides a low-particle zone proximal to a substrate as mentioned in this paper.
19
Patent
Mass flow controller and method of operating the same
Alexei V. Smirnov,R. Mike McDonald,Justin Mauck +2 more
- 13 Oct 2009
TL;DR: In this paper, a thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients, which is called mass flow controller thermal sensor.
18
Patent
Apparatus and Techniques for Electronic Device Encapsulation
Alexander Sou-Kang Ko,Justin Mauck,Eliyahu Vronsky,Conor F. Madigan,Eugene Rabinovich,Nahid Harjee,Christopher Buchner,Gregory Lewis +7 more
- 01 Jun 2015
TL;DR: In this paper, an organic light emitting diode (OLED) device can be manufactured using one or more modules having a controlled environment, which can be arranged to provide various processing regions and to facilitate printing or deposition of patterned organic layers of an OLED device.
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