Junichi Katane
Hitachi
10 Papers
181 Citations
Junichi Katane is an academic researcher from Hitachi. The author has contributed to research in topics: Charged particle beam & Charged particle. The author has an hindex of 4, co-authored 9 publications.
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Papers
Patent
Scanning electron microscope
Michio Hatano,Sukehiro Ito,Shinichi Tomita,Junichi Katane +3 more
- 15 Oct 1996
TL;DR: In this paper, an electron microscope with a pole piece electrode for accelerating primary electrons emitted at an electron source and an objective lens including the pole piece electrodes is presented, where an electrically and magnetically insulated gap is formed between the pole pieces electrode and other pole piece, and an auxiliary coil is concentrically disposed with the objective lens at a middle position between the gap and a detection surface of the electron detector.
109
Patent
Charged particle radiation device
Junichi Katane,Sukehiro Ito +1 more
- 20 Jan 2010
TL;DR: In this paper, a detachable diaphragm is used to separate a charged particle optical lens barrel from a space in which a sample is placed, wherein a detector for detecting secondary particles emitted from the sample as a consequence of being irradiated with the primary charged particle beams is disposed within the space of which the sample was placed.
49
Patent
Charged particle beam apparatus and method for charged particle beam adjustment
Takeshi Ogashiwa,Mitsugu Sato,Atsushi Takane,Toshihide Agemura,Yuusuke Narita,Takeharu Shichiji,Shinichi Tomita,Sukehiro Ito,Junichi Katane +8 more
- 08 Mar 2007
TL;DR: In this article, the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), and a first processing step for measuring the sensitivity of the aligner and a second processing step is used to detect the deviation between the center of the primary charge particle and the objective aperture.
12
Patent
Charged particle beam device, image generation method, observation system
Ominami Yusuke,Junichi Katane,Kawanishi Shinsuke,Ito Sukehiro +3 more
- 24 Dec 2014
TL;DR: In this paper, a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner is presented, which operates in a transmitted charged particle image mode and a secondary charged particle imaging mode.
7
Patent
Charged particle beam adjustment method and charged particle beam device
Toshihide Agemura,Masuhiro Ito,Junichi Katane,Takeshi Kogashiwa,Yusuke Narita,Mitsugi Sato,Takeji Shichiji,Atsushi Takane,Shinichi Tomita,武治 七字,祐博 伊東,貢 佐藤,真一 富田,剛 小柏,祐介 成田,寿英 揚村,純一 片根,淳 高根 +17 more
- 07 Mar 2007
TL;DR: In this article, the authors proposed an adjustment method consisting of a processing step 1 of measuring, when adjusting a beam center axis of a primary charged particle beam by an aligner, the sensitivity of the aligner; and a process step 2 of detecting a deviation between a center of the primary charged PSB and a centre of the objective aperture.
4