An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and millimeter-wave filters, low-loss micromechanical switches, microscale vibrating mechanical resonators with Q's in the tens of thousands, and miniature antennas for millimeter-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers.

/pdf/micromachined-devices-for-wireless-communications-47hz8mr1oo.pdf

Micromachined devices for wireless communications

Wireless communication has led to an explosive growth of emerging consumer and military applications of radio frequency (RF), microwave and millimeter wave circuits and systems. Future personal (hand-held) and ground communications systems as well as communications satellites necessitate the use of highly integrated RF front-ends, featuring small size, low weight, high performance and low cost. Continuing chip scaling has contributed to the extent that off-chip, bulky passive RF components, such as high-Q inductors, ceramic and SAW filters, varactor diodes and discrete PIN diode switches, have become limiting. Micro-machining or MEMS technology is now rapidly emerging as an enabling technology to yield a new generation of high-performance RF-MEMS passives to replace these off-chip passives in wireless communication (sub)systems. This paper reviews the progress in RF-MEMS from a device and integration perspective. The worldwide state-of-the-art of RF-MEMS devices including switches, variable capacitors, resonators and filters are described. Next, it is stipulated how integration of RF-MEMS passives with other passives (as inductors, LC filters, SAW devices, couplers and power dividers) and, active circuitry (ASICs, RFICs) can lead to the so-called RF-MEMS system-in-a-package (RF-MEMS-SiP) modules. The evolution of the RF-MEMS-SiP technology is illustrated using IMEC's microwave multi-layer thin-film MCM-D technology which today already serves as a technology platform for RF-SiP.

https://iopscience.iop.org/article/10.1088/0960-1317/13/4/323/pdf

MEMS for wireless communications: 'from RF-MEMS components to RF-MEMS-SiP'

An open-structure eigenvalue problem of substrate integrated waveguide (SIW) cavity structures is investigated in detail by using a finite-difference frequency-domain method, and the quality (Q) factor of such SIW cavities is given. Based on the concept of a defected ground structure, a new class of SIW cavity bandpass filters are designed, fabricated, and measured around 5.8 GHz. With their fabrication on standard printed circuit boards, such filters present the advantages of high-Q factor, high power capacity, and small size. Simulated and measured results are presented and discussed to show promising performances of the proposed filters.

Novel substrate integrated waveguide cavity filter with defected ground structure

This paper presents novel planar dynamically reconfigurable double-stub tuners that utilize electrostatically activated microelectromechanical system (MEMS) switches. The tuners operate in the 10-20 GHz frequency range and have stubs that consist of a digital capacitor bank. Each bank has a predetermined number of capacitors that can be selected through the activation of appropriate MEMS switches. The value and number of capacitors is dictated by the range of loads that needs to be matched. Simulated and measured results from several designs are presented. A 4 bit /spl times/ 4 bit tuner that can match loads with 1.5 /spl Omega/<Re{Z/sub L/}<109 /spl Omega/ and -107 /spl Omega/<Im{Z/sub L/}<48 /spl Omega/ at 20 GHz equivalent to three quadrants of the Smith chart and loads with 3 /spl Omega/<Re{Z/sub L/}<94 /spl Omega/ and -260 /spl Omega/<Im{Z/sub L/}<91 /spl Omega/ at 10 GHz is demonstrated for the first time, as well as other designs. The demonstrated tuners provide real-time reconfiguration and matching for RF loads that change values during system operation. Applications include the development of several novel highly integrated microwave/millimeter-wave circuits such as ultra-wide-band high output power and increased power-added-efficiency amplifiers, ultra-wide-band multipliers, and very broad-band antenna arrays. It is expected that these circuits will be part of future low-cost and low-power intelligent RF front-end microsystems and systems-on-a-chip.

Reconfigurable double-stub tuners using MEMS switches for intelligent RF front-ends

Gap waveguide technology represents an interesting alternative as low-loss, cost-effective, and high-performance transmission line and package of microwave and millimeter-wave systems. A Ka-band coupled-resonator filter for a radio link diplexer, which requires high selectivity to isolate transmit and receiving channels, is proposed and realized using gap waveguide technology. The band-pass filter, which has a central frequency of 37.37 GHz and a pass bandwidth of 560 MHz, is fabricated between two parallel metal plates, leaving an air gap between them. After milling one of the plates, silver-plating is applied on them. Measurements show a minimum in-band insertion loss of 1 dB and agree quite well with simulations.

/pdf/ka-band-gap-waveguide-coupled-resonator-filter-for-radio-5cljx85cou.pdf

Ka-Band Gap Waveguide Coupled-Resonator Filter for Radio Link Diplexer Application

The authors present a new structure which can be used as a microwave high-Q resonator for the development of narrow-band low-loss filters in a planar environment. The resonator is made of a low-loss micromachined cavity which is easy to integrate with monolithic circuits. Compared to conventional metallic resonators, the performance of this resonator is similar, but the weight and size are significantly reduced.

A micromachined high-Q X-band resonator

This letter presents a new structure which can be used as a microwave high- resonator for the development of narrow-band low-loss filters in a planar environment. The res- onator is made of a low-loss micromachined cavity which is easy to integrate with monolithic circuits. Compared to conventional metallic resonators, the performance of this resonator is similar, but the weight and size are significantly reduced.

http://ieeexplore.ieee.org/iel4/75/12674/00585207.pdf

A Micromachined High- X-Band Resonator

Analysis of a slot coupled and stripline fed patch antenna

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A micromachined high-Q X-band resonator

A Micromachined High- X-Band Resonator

Analysis of a slot coupled and stripline fed patch antenna