Aluminium nitride (AlN) ceramic is a typically difficult-to-machine material used in electronic packaging. Laser and chemical milling enhanced micro milling (LCMEM), a high-quality and efficient processing method for AlN, is proposed in this study. Rough machining is completed by repeated alternating laser ablation and chemical removal; the final finish is achieved by micro milling (MM). To achieve precise laser and chemical milling parameters based on the target structure, a laser and chemical milling (LCM) prediction model is established and verified; this can be used to predict the morphology of the grooves after LCM. The change trend of the grooves after LCM with the laser parameters is investigated. It was found that LCMEM can improve the surface quality by 60%, and an optimal finishing surface with a surface roughness Ra value of 54 nm can be obtained when the feed per tooth is 0.4 μm/z. Lastly, this study uses LCMEM to produce a high aspect ratio groove with aspect ratio of 2.5 and depth of 1250 μm. Compared with conventional MM, LCMEM reduces the allowance of MM by 71.95%, improves the groove accuracy, and reduces tool wear. 

Fabrication of high aspect ratio grooves on aluminium nitride by laser and chemical milling enhanced micro milling

Laser ablation is demonstrated to be a competent approach to processing chemical vapor deposition (CVD) diamond which is admitted to own poor machinability and is accordingly arduous to machine using conventional techniques. Notwithstanding, initial laser absorption by defects typically precipitates undesirable ablation quality and an increment in internal defects. The strategy of metal-coating-assisted laser ablation, which applies a coating on the diamond prior to laser irradiation to curtail defects and advance the quality of the ablated surface, is proposed in this study. In addition, an absorptivity-based laser energy distribution model is established to evaluate surface roughness and ablation depth. It can be concluded that the metal coating prevents local graphitization during the early ablation stage. The laser ablation of Ti-coated diamond surfaces resulted in a maximum reduction in surface roughness of 42.6% and 53%, respectively, for 100 and 500 nm coating, in comparison to that with the uncoated surfaces. Besides, the ablation depth of the laser-ablated 500 nm coating surface abates and reaches 21% in comparison with the uncoated diamond, while the 100 nm coating has a negligible effect on the ablation depth. In summary, the application of thin coatings on diamond prior to laser ablation results in homogeneous graphitization and a better surface finish with a marginal reduction in ablation depth. 

Investigation of metal-coating-assisted IR nanosecond pulsed laser ablation of CVD diamond

Simultaneously enhanced thermal conductivity and dielectric properties of borosilicate glass-based LTCC with AlN and h-BN additions

Effect of spoiler columns on heat transfer performance of aluminum nitride-based microchannel heat sink

Sharpening Mechanism of Extremely Sharp Edges for Diamond Micro Mills

SKD11 is widely used in manufacturing die. With the development of industrial level, the size of the die is further reduced, and the difficult processing problem of high aspect ratio (HAR) micro-structures is exposed. Micro-milling is a suitable method for machining HAR micro-structures; however, the inevitable generation of burrs deteriorates the machined surface. Previous studies have mostly focused on the burr formation process of shallow grooves but have ignored HAR grooves. This paper investigated the burr formation mechanism in HAR (2:1) grooves on harden steel (SKD11). Due to the fact that the burr formation process was difficult to be observed in the actual micro-milling process, a finite element model was established. A corresponding experimental research was conducted, which revealed a good consistency between simulation and experimental results. Moreover, a new burr type was formed on the sidewall of the HAR groove, which was transformed from top burrs and was named as side burr. The results demonstrated that the chip flow on the rake face of the micro-mill was hindered by the sidewall, which caused chip crumbling, chip accumulation, and surface scraping, seriously affecting the burr formation mechanism. This paper revealed the burr formation mechanism for HAR grooves on SKD11, which provides basic data for manufacturing die with complex structure and small size.

/pdf/study-on-the-burr-formation-process-in-micro-milling-of-high-1053aa3rvb.pdf

Study on the burr formation process in micro-milling of high aspect ratio structures

Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation

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Study on the burr formation process in micro-milling of high aspect ratio structures

Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation