Jaeseok Bae
Korea University of Science and Technology
10 Papers
34 Citations
Jaeseok Bae is an academic researcher from Korea University of Science and Technology. The author has contributed to research in topics: Interferometry & Wafer. The author has an hindex of 5, co-authored 10 publications.
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Papers
A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry
TL;DR: In this article, a review of optical interferometric methods for measuring thicknesses of thick transparent layers are introduced through a discussion of basic principles and applications, with consideration of optical layouts and analysis methods of interference signals.
81
Vibration-insensitive measurements of the thickness profile of large glass panels.
TL;DR: A modified spectral-domain interferometer to measure the physical thickness profile and group refractive index distribution of a large glass substrate simultaneously and to verify the insensitivity to vibration is proposed.
37
Optical method for simultaneous thickness measurements of two layers with a significant thickness difference.
TL;DR: In this paper, an optical method that allows simultaneous thickness measurements of two different layers distributed over a broad thickness range from several tens of nanometers to a few millimeters based on the integration of a spectroscopic reflectometer and a spectral-domain interferometer is proposed.
21
A Hybrid Non-destructive Measuring Method of Three-dimensional Profile of Through Silicon Vias for Realization of Smart Devices
TL;DR: A novel hybrid optical probe working based on optical interferometry, confocal microscopy and optical microscopy was proposed and realized for enhancing inspection efficiency in this report, which offers a practical example for estimating the performance of inspection machines operating with numerous principles at semiconductor manufacturing sites.