A plasma processing chamber including a slip cast part having a surface thereof exposed to the interior space of the chamber The slip cast part includes free silicon contained therein and a protective layer on the surface which protects the silicon from being attacked by plasma in the interior space of the chamber The slip cast part can be made of slip cast silicon carbide coated with CVD silicon carbide The slip cast part can comprise one or more parts of the chamber such as a wafer passage insert, a monolithic or tiled liner, a plasma screen, a showerhead, dielectric member, or the like The slip cast part reduces particle contamination and reduces process drift in plasma processes such as plasma etching of dielectric materials such as silicon oxide

Semiconductor processing equipment having improved process drift control

A method for coating a substrate having a plurality of channels with a coating media in which the substrate is partially immersed into a vessel containing a bath of the coating media with the volume of coating media lying above the end of the immersed substrate being sufficient to coat the substrate to a desired level. A vacuum is then applied to the partially immersed substrate at an intensity and time sufficient to draw the coating media upwardly from the bath into each of the channels to form a uniform coating profile therein.

Method for coating a substrate

The invention concerns a friction element produced in a composite material comprising a carbon fiber reinforcement and a matrix which, at least in the proximity of each or the friction surface, comprises: a first phase containing pyrocarbon obtained by chemical infiltration in vapour phase, in the proximity of the reinforcing fibers, a second carbon or ceramic refractory phase obtained at least partly by pyrolysis from a liquid precursor, and a silicon carbide phase obtained for example by siliconizing. Preferably, at least in the proximity of each or the friction surface, the composite material is constituted, in volume, of at least: 15 % to 35 % of carbon fibers, 10 % to 55 % of the first matrix phase containing pyrocarbon, 2 % to 30 % of the second matrix phase in refractory material, and 10 % to 35 % of silicon carbide. The invention is particularly useful for railway braking and for motor vehicles.

Friction element in composite carbon/carbon-silicon carbide material and method for manufacturing same

This invention describes the infiltration methods used to incorporate ceramic additives in carbon/carbon brake disc preforms. Aqueous vacuum infiltration techniques were employed. Both methods were effective in achieving homogeneous dispersion of ceramic additives throughout brake disc thickness. Heat treatment processes were developed to convert oxide additives to more refractory phases. Both temperature and N 2 overpressure were precisely controlled during conversion. By using the additives, infiltration routes, and heat treatment schedules, brake disc friction material performance properties such as friction coefficient, friction coefficient stability, and brake disc wear rate are improved. The disclosed carbon/carbon brake discs can be used in aerospace, automotive and other friction material applications.

Carbon/carbon friction material

This invention relates to a method of inhibiting oxidation of a porous carbon-carbon composite comprising the steps of: (a) contacting the carbon-carbon composite with an oxidation inhibiting composition comprising phosphoric acid or an acid phosphate salt, at least one aluminum salt, and at least one additional metal salt, the oxidation inhibiting composition penetrating at least some of the pores of the carbon-carbon composite; and (b) heating the carbon-carbon composite at a temperature sufficient to form a deposit from the oxidation inhibiting composition within at least some of the penetrated pores of the carbon-carbon composite. The invention also relates to the foregoing oxidation inhibiting composition. The invention relates to carbon-carbon composites treated by the foregoing method.

Oxidation inhibition of carbon-carbon composites

Each of the friction surfaces of a brake disk (10) is masked (plates 40, 46) in order to seal it in a liquid-impervious manner from the outside, and the disk is immersed in an information composition bath (30) contain-ing at least one product capable of forming an anti-oxidative layer The impregnation is ob-tained by creating a pressure differential be-between the exposed surfaces of the immersed brake disk (10) and the inside of the inner open pores of the disk, without creating a to-tal internal vacuum, so as to force the im-pregnation composition into the inner open pores of the disk to a given depth from the exposed surfaces, and to form the inner anti-oxidative coating The pressure differential is controlled in accordance with the desired penetration depth of the impregnation com-position into the inner open pores

Method for applying an anti-oxidative coating on brake disks of a carbon-containing composite material

A number of porous substrates (10) are arranged alternately in contact with layers (12) forming metal-based composition sources. Each layer includes a major phase consisting of the metal-based composition and a minor phase capable of forming a structure for retaining and draining the molten metal-based composition. The load is heated to a temperature higher than the melting point of the metal-based composition so that said molten metal-based composition can migrate from each source into the substrate through the adjacent surface of the or each substrate adjacent to the source. The method is particularly suitable for delivering a silicon composition into a thermo-structural composite material, in particular a carbon-carbon composite material, for silicidising purposes.

Method for delivering a molten silicon composition into porous substrates

The material is impregnated with an aqueous solution containing the precursors of a phosphate glass base modified by at least the presence of zinc oxide, dried and heat treated to form an internal anti-oxidative coating comprising the modified phosphate glass base. The precursors are fed into the aqueous solution so as to form a glass base wherein the molar ratio of the glass modifying oxides, including zinc oxide and glass-forming oxides, consisting of mainly or only phosphoric anhydride, is sufficiently high, particularly 0.6 or over, preferably 0.9, to make the phosphate glass base resistant to moisture corrosion. The solution is obtained by initially dissolving in water a polyphosphate such as sodium metaphosphate or trimetaphosphate capable of subsequently stably solubilising, by complexing, and without precipitate formation, the required amount of precursor salts of the modifying oxides, comprising at least one zinc salt such as zinc nitrate or sulphate.

Method for protecting a porous carbon-containing material from oxidation and material obtained thereby

Verfahrem zum anbringen eines oxidationsschutz auf bremsscheiben aus kohlenstoff enthaltendem verbundmaterial

Plusieurs substrats poreux (10) sont disposes en alternance et en contact avec des couches (12) qui constituent des sources de composition a base metallique, chaque couche comprenant une phase majoritaire formee par la composition a base metallique et une phase minoritaire apte a former une structure de retention et de drainage de la composition a base metallique a l'etat fondu, le chargement est chauffe a une temperature superieure a la temperature de fusion de la composition a base metallique de sorte que, a partir de chaque source, la composition a base metallique a l'etat fondu peut migrer, a travers la surface adjacente du ou de chaque substrat voisin de la source, vers l'interieur du substrat. L'invention vise notamment l'introduction d'une composition a base de silicium au sein d'un materiau composite thermostructural, en particulier un materiau composite carbone-carbone aux fins de siliciuration.

Procede pour l'introduction dans des substrats poreux d'une composition en fusion a base de silicium

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