In this paper, we report the development of an optical sensor network (OSN) based on piezoelectrically actuated corner cube retroreflectors (PA-CCRs). PA-CCRs were fabricated by microelectromechanical systems processes and assembled by aligning horizontally actuated mirrors and vertical side walls in a holder, which allows mass production. Fabricated PA-CCRs showed a tilting angle by more than 1.5 deg at 5 V bias voltage. A 3 dB cutoff frequency was measured to be in the range of 3.5 kHz. To show the feasilbility, an OSN was established based on fabricated PA-CCRs for on-off keying passive transmission links. The results demonstrated data transmission at a rate up to 5 kb/s.

Development and characterization of piezoelectrically actuated corner cube retroreflectors for applications in free-space optical sensor network

The invention relates to a micro-pyramid reflector, in particular to an angle-adjustable micro-pyramid reflector array structure and a manufacturing method thereof, and solves the problem that the finished product ratio and the working performance of a micro-pyramid reflector cannot be ensured as an assembly process is limited in an existing micro-pyramid reflector manufacturing method. The angle-adjustable micro-pyramid reflector array structure comprises a square silicon substrate, a square silicon dioxide layer, a lower platinum titanium electrode layer, a square platinum titanium bottom mirror, a PZT (piezoelectric transducer) driving cantilever beam, a PZT balance beam, an upper platinum titanium electrode layer, a crossed side mirror and a gold layer, a square through hole is formed between the front and the back of the square silicon substrate in a communicated manner, the square silicon dioxide layer is stacked on the front of the square silicon substrate, and four groups of through holes are formed between the front and the back of the square silicon dioxide layer in a communicated manner. The angle-adjustable micro-pyramid reflector array structure is applicable to wireless laser communication.

Angle-adjustable micro-pyramid reflector array structure and manufacturing method thereof

Corner cube retroreflectors (CCRs) have applications in sensors, image processing, free space communication and wireless networks. The ability to construct low-loss wavelength filters embedded in CCRs can enable the development of wavelength multiplexing, tunable lasers and photonic integrated circuits. Here we created an ~10-μm-thick holographic corner cube retroreflector (HCCR) array that acted as a color-selective wavelength filter and diffracted light at broad angles. Angle-resolved spectral measurements showed that the Bragg peak of the diffracted light from the HCCR array could be tuned from 460 to 545 nm by varying the incident angle. The HCCR array also exhibited a wavelength-selective tuning capability based on the rotation angle in the visible spectrum. HCCRs projected holographic images with the rotational property in the far field. The utility of the HCCR was demonstrated as optical temperature and relative humidity sensors that produced a visible colorimetric response for rapid diagnostics. Planar arrays of reflectroreflectors can function as sensitive optical sensors for determing changes in temperature or relative humidity. Haider Butt at the University of Birmingham in the UK and co-workers used holography to write an array of planar holographic corner cube reflectors in a layer of gelatin containing silver bromide nanocrystals. Due to diffraction, the array reflects a narrow-band signal (Bragg peak) whose wavelength is sensitive to external conditions. In particular, the color of reflection changes when variations in temperature or relative humidity cause the internal structure of the holographic medium to swell or shrink. The peak wavelength of reflection of the array changed between 500 and 700 nanometers as the relative humidity was varied between 10 and 80%. The researchers anticipate that such arrays could find application in compact optical systems and sensors.

/pdf/color-selective-holographic-retroreflector-array-for-sensing-276amj2cnu.pdf

Color-selective holographic retroreflector array for sensing applications

In this paper, a bulk-micromachined corner cube retroflector (CCR) with ultra-low voltage operation and negligible power consumption has been newly designed and fabricated for free space optical communication applications. The proposed CCR was comprised of bulk-micromachined vertical mirror which has two mutually orthogonal reflective surfaces and one piezoelectrically actuating horizontal mirror. The fabricated CCR has 300µm × 300µm of reflective surfaces. The vertical mirror with two orthogonal reflective surfaces can be obtained by using double SOI-wafer and anisotropic wet etching of (110) silicon wafer. The horizontal bottom mirror was comprised of two supporting and one actuating PZT cantilevers with meander shaped hinges. The supporting cantilevers and the meander hinges were used for accurate angular alignment of mirror by balancing and isolating the residual stresses occurred in the released PZT cantilevers after fabrication. The bottom actuated mirror exhibited a angular displacement of 1.87° at 5 volts applied with on-off switching in 276µs. The fabricated CCR can be digitally modulated up to 1kb/s.

Silicon bulkmicromachined piezoelectrically actuated corner cube retroflector

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Silicon bulkmicromachined piezoelectrically actuated corner cube retroflector