Sputtering by ion bombardment theoretical concepts

Computer Studies of the Slowing Down of Energetic Atoms in Crystals

Planar and axial channeling effects of 3-11-MeV protons in 25-50-\ensuremath{\mu}-thick silicon and germanium single crystals were investigated by studying the direction and energy distributions of the transmitted particles. The total energy distributions were investigated as function of crystal orientation using a large-acceptanceangle solid-state detector Limiting angles of incidence for channeling were obtained at several incident energies and crystal thicknesses. The energy and intensity as a function of emergence angles (for a fixed angle of incidence) were obtained by scanning the emergent proton distributions with a small-acceptanceangle detector (75.\ifmmode\times\else\texttimes\fi{}${10}^{\ensuremath{-}7}$ sr) or a masked lithium-drifted position-sensitive detector in a plane 102 cm from the crystal. The least energy loss for protons transmitted parallel to the $〈110〉$ and $〈111〉$ axes and the {111}, {110}. and {100} planes of silicon were investigated and it was found that the least energy loss for each axis was the same as that of the most open planes intersecting at that axis. Measurements of the least energy loss and its straggling were made for the {111} and {110} planes of silicon and germanium. A mechanism of least energy loss is presented for which it is assumed that the energy loss of the well-channeled protons is due to interactions with the weakly bound valence electrons only. The measurements agree well with the theory and are used to extract the local density of valence electrons sampled by the well-channeled protons. A theoretical model of channeling is presented and comparisons made with experiment. Average potentials for the atom rows and planes of silicon are calculated for the static lattice at different temperatures. Multiple Coulomb scattering into channels is considered, as well as the trajectories of the high-loss particles.

Channeling Effects in the Energy Loss of 3-11-MeV Protons in Silicon and Germanium Single Crystals

Approximations and interpolation rules for ranges and stragglings in amorphous substances are presented. Two energy regions, termed low and intermediate energies, corresponding to the dimensionless energy epsilon being in the intervals 0.002<∊<0.1 and 0.5<∊<10, respectively, are defined. For low energies the projected range is approximately proportional to E2/3 , and for intermediate energies approximately proportional to E. For low energies, approximate stragglings are also obtained. The agreement of the results with accurate range-calculations is better than ∼10 per cent.

Approximations and interpolation rules for ranges and range stragglings

Dislocation loops have been observed in iron foils irradiated with protons or Fe+ ions of energy 150 kev. Those produced by irradiation with Fe+ ions are shown to lie on {100} planes and to be pure edge in character. They are normally square, with the sides in the corresponding directions, and are formed by the condensation of interstitial atoms. It is believed that the loops are formed because of the excess concentration of interstitial atoms resulting from the direct insertion of atoms on bombardment. It is shown that either a homogeneous or a heterogeneous nucleation mechanism can account for the loop density observed. Finally, an estimate is made of the strain energy of various modes of condensation of point defects in iron. The most favoured are ½[111] (110), ½[111] (111), and [100] (100).

Dislocation loops in irradiated iron

Electromagnetically enriched isotopes and mass spectrometry: edited by M. L. Smith. 272 pages, diagrams and illustrations, 512 × 812 in. New York, Academic Press, Inc.; London, Butterworths Scientific Publications; 1956. Price, $8.00

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Electromagnetically enriched isotopes and mass spectrometry: edited by M. L. Smith. 272 pages, diagrams and illustrations, 512 × 812 in. New York, Academic Press, Inc.; London, Butterworths Scientific Publications; 1956. Price, $8.00