Heavy-ion irradiation defect accumulation in ZrN characterized by TEM, GIXRD, nanoindentation, and helium desorption

Ternary transition metal nitride thin films, with thickness up to 300 nm, were deposited by dc reactive magnetron cosputtering in Ar–N2 plasma discharges at 300 °C on Si substrates Two systems were comparatively studied, Ti–Zr–N and Ti–Ta–N, as representative of isostructural and nonisostructural prototypes, with the aim of characterizing their structural, mechanical, and electrical properties While phase-separated TiN–ZrN and TiN–TaN are the bulk equilibrium states, Ti1−xZrxN and Ti1−yTayN solid solutions with the Na–Cl (B1-type) structure could be stabilized in a large compositional range (up to x=1 and y=075, respectively) Substituting Ti atoms by either Zr or Ta atoms led to significant changes in film texture, microstructure, grain size, and surface morphology, as evidenced by x-ray diffraction, x-ray reflectivity, and scanning electron and atomic force microscopies The ternary Ti1−yTayN films exhibited superior mechanical properties to Ti1−xZrxN films as well as binary compounds, with hardness 

Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–N

Stress, phase stability and oxidation resistance of ternary Ti–Me–N (Me = Zr, Ta) hard coatings

Structure, phase stability and elastic properties in the Ti1–xZrxN thin-film system: Experimental and computational studies

Recent Advances and Strategies for High-Performance Coatings

Titanium nitride is a technological important refractory material combining the physical properties of ceramics and metal. In addition to its wide use as protective hard coating for cutting tools or metallization layer in microelectronics, it is one of the inert matrixes proposed to surround the fuel in future gas cooled fast reactor (GFR) systems. The application of low-dose inert gas ions in materials is a powerful method for studying material properties changes due to irradiation damage. In this work, the influence of Xe-ion irradiation on the structure, electrical and mechanical properties of ternary TiN-based coating is investigated. Ti x Zr 1 −  x N ( x  = 0, 0.25, 0.50, 0.75, 1) thin films (∼ 300 nm thickness) were deposited on (100) Si substrate using unbalanced reactive magnetron co-sputtering. Irradiation with Xe ( q  = + 18) ions were carried out at fluence of 8 · 10 14  ions cm − 2 and energy of 360 keV. The morphology, phase and element compositions of the as-grown and irradiated samples were studied using SEM, XRD and RBS. It is found that the simultaneous sputtering of metal targets in Ar/N 2 atmosphere leads to formation of ternary solid solution nitrides with Na–Cl structure with enhanced hardness compared to binary counterpart while the nanohardness decreases for binary nitrides after ion irradiation and increase is observed for ternary nitrides. A detailed analysis of elastic strains and stresses changes after ion irradiation is also performed.

Stability of Ti–Zr–N coatings under Xe-ion irradiation

The data on the influence of irradiation of (Ti, Cr)N1–x coatings by helium and argon ions on their surface structure are presented. The (Ti, Cr)N1–x coatings 50–300 nm in thickness were formed on carbon steel substrates by vacuum-arc deposition. Irradiation of the coated specimens was performed in a DC-60 heavy-ion accelerator by low-energy 4He+1, 4He+2 and 40Ar5+ ions and high-energy 40Ar5+ ions up to the fluence 1.0·1017 ion/cm2 at the irradiation temperature not higher than 150°С. It is shown that irradiation of the (Ti, Cr)N1–x coating surface by 4He+1, 4He+2 and 40Ar5+ ions with the energy 20 keV/charge does not give rise to any noticeable structural changes nor any surface blistering, while its irradiation by 40Ar5+ ions with the energy 1.50 MeV/amu causes blistering.

Radiation Stability of Triple Coatings Based on Transition-Metal Nitrides Under Irradiation By Alpha Particles and Argon Ions

/pdf/effects-of-irradiation-with-low-energy-and-high-energy-3ja4uw99cu.pdf

Effects of Irradiation with Low-Energy and High-Energy Krypton Ions on the Structure of TiCrN Coatings

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Stability of Ti–Zr–N coatings under Xe-ion irradiation

Radiation Stability of Triple Coatings Based on Transition-Metal Nitrides Under Irradiation By Alpha Particles and Argon Ions

Effects of Irradiation with Low-Energy and High-Energy Krypton Ions on the Structure of TiCrN Coatings