7 Papers
2 Citations
Heulbi Ahn is an academic researcher from Korea University of Science and Technology. The author has contributed to research in topics: Interferometry & Polarization (waves). The author has an hindex of 4, co-authored 6 publications.
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Papers
A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry
TL;DR: In this article, a review of optical interferometric methods for measuring thicknesses of thick transparent layers are introduced through a discussion of basic principles and applications, with consideration of optical layouts and analysis methods of interference signals.
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Optical method for simultaneous thickness measurements of two layers with a significant thickness difference.
TL;DR: In this paper, an optical method that allows simultaneous thickness measurements of two different layers distributed over a broad thickness range from several tens of nanometers to a few millimeters based on the integration of a spectroscopic reflectometer and a spectral-domain interferometer is proposed.
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A Hybrid Non-destructive Measuring Method of Three-dimensional Profile of Through Silicon Vias for Realization of Smart Devices
TL;DR: A novel hybrid optical probe working based on optical interferometry, confocal microscopy and optical microscopy was proposed and realized for enhancing inspection efficiency in this report, which offers a practical example for estimating the performance of inspection machines operating with numerous principles at semiconductor manufacturing sites.
Optical Fiber-Based Confocal and Interferometric System for Measuring the Depth and Diameter of Through Silicon Vias
TL;DR: In this paper, a spectral-domain interferometer and confocal microscope are used to measure the diameter and depth of through silicon vias simultaneously, and a novel method based on spectral domain interferometers and confocors is proposed and realized.
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