Recently, the extensive utilization of porous polymeric materials to amplify the sensitivity of capacitive devices is noticeable. The absence of an effective mathematical model for studying these devices has spurred the development of a comprehensive mathematical model in the current work. This model is formulated to analyze the static and dynamic behavior of systems incorporating a porous polymer dielectric material within the gap between flexible and fixed microplates. The derived nonlinear governing equations encompass the effects of electrostatic force, von-Karman nonlinear strains, and displacement-dependent porosity. Employing spatial decomposition, the resulting nonlinear algebraic equations and ordinary differential equations are leveraged to study the static and transient dynamic behavior, as well as the frequency response of the sensor using a learning approach. Two scenarios are investigated to assess the impact of various geometrical and physical parameters on sensor sensitivity one with a polymeric material and another without, each with distinct parameter values. The results reveal that the inclusion of a polymeric dielectric material increases electrostatic force but concurrently elevates the equivalent stiffness of the structure. The effectiveness of using a polymeric dielectric material is contingent upon the specific geometrical and physical properties of the sensor. Moreover, the obtained results in simplified cases are compared to existing numerical and experimental data, demonstrating a high degree of agreement. This work significantly contributes to advancing the understanding of sensors incorporating porous polymer dielectric materials and underscores their potential for enhanced sensitivity across diverse applications. 

Analyzing the effects of polymeric dielectric materials on micro capacitive pressure sensors: A model incorporating displacement-dependent porosity

We report a whispering gallery mode resonator on a pillar using inkjet printing combined with traditional microfabrication techniques. This approach enables several different polymers on the same chip for sensing applications. However, polymers inherently exhibit sensitivity to multiple stimuli. To mitigate temperature sensitivity, careful selection of design parameters is crucial. By precisely tuning the undercut-to-radius ratio of the resonator, a linear dependence in temperature sensitivity ranging from -41.5 pm/°C to 23.4 pm/°C, with a zero-crossing point at 47.6% is achieved. Consequently, it is feasible to fabricate sensing devices based on undercut microdroplets with minimal temperature sensitivity. The lowest measured temperature sensitivity obtained was 5.9 pm/°C, for a resonator with an undercut-to-radius ratio of 53%.

Temperature Sensitivity Control of an Inkjet-Printed Optical Resonator on Pillar.

Microbottle resonators (MBR) are bottle-like structures fabricated by varying the radius of an optical fiber. MBRs can support whispering gallery modes (WGM) by the total internal reflection of the light coupled into the MBRs. MBRs have a significant advantage in sensing and other advanced optical applications due to their light confinement abilities in a relatively small mode volume and having high Q factors. This review starts with an introduction to MBRs’ optical properties, coupling methods, and sensing mechanisms. The sensing principle and sensing parameters of MBRs are discussed here as well. Then, practical MBRs fabrication methods and sensing applications are presented.

/pdf/review-of-microbottle-resonators-for-sensing-applications-2gjzsy47.pdf

Review of Microbottle Resonators for Sensing Applications


 A refractive index sensor based on a whispering gallery mode resonator is numerically investigated in this paper. Whispering gallery mode resonators confine light and can be used in sensing applications, and this work presents the model built using COMSOL software to analyze their sensing performance. This work has investigated the WGM resonators’ response to refractive index changes numerically using 2D models in the refractive index ranges 1.000 and 1.333. The resonator showed a sensitivity of 167 nm/RIU in the refractive index range of 1.3331.4 and a sensitivity of 95 nm/RIU in the refractive index range of 1.000-1.010. The sensing resonator has potential applications for biological and chemical analytes.

Development and analysis of whispering gallery mode model for refractive index sensing

Whispering gallery mode (WGM) sensors offer a promising alternative to conventional relative humidity (RH) sensors, due to their high quality (Q) factors and sensitivity to environmental changes. In this work, we demonstrate a WGM microsphere-based RH sensor featuring a $170~\mu $ m diameter resonator coupled with a tapered optical fiber. The resonator was coated with a hydroxyethyl cellulose/polyvinylidene fluoride (HEC/PVDF) composite to enhance humidity sensitivity, resulting in a wavelength shift sensitivity of 0.4 pm/%RH and an attenuation response of 0.125 dB/%RH. The sensor was further utilized to generate a dataset of barcoded spectral responses, which were used to train and test a convolutional neural network (CNN) classifier, achieving an accuracy of 98%.

HEC/PVDF-Coated Micro-Sphere Humidity Sensor Using CNN-Based Barcoding

Temperature-Independent Relative Humidity Sensing Properties of polymer Micro-bottle Resonators Coated with Graphene Oxide

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Temperature-Independent Relative Humidity Sensing Properties of polymer Micro-bottle Resonators Coated with Graphene Oxide