2D-nanomaterials for controlling friction and wear at interfaces

Chemical mechanical planarization (CMP) has become one of the most critical processes in semiconductor device fabrication to achieve global planarization. To achieve an efficient global planarization for device node dimensions of less than 32 nm, a comprehensive understanding of the physical, chemical, and tribo-mechanical/chemical action at the interface between the pad and wafer in the presence of a slurry medium is essential. During the CMP process, some issues such as film delamination, scratching, dishing, erosion, and corrosion can generate defects which can adversely affect the yield and reliability. In this article, an overview of material removal mechanism of CMP process, investigation of the scratch formation behavior based on polishing process conditions and consumables, scratch formation mechanism and the scratch inspection tools were extensively reviewed. The advantages of adopting the filtration unit and the jet spraying of water to reduce the scratch formation have been reviewed. The current research trends in the scratch formation, based on modeling perspective were also discussed.

/pdf/scratch-formation-and-its-mechanism-in-chemical-mechanical-3l5jk3f4c2.pdf

Scratch formation and its mechanism in chemical mechanical planarization (CMP)

Abstract Lubricants have played important roles in friction and wear reduction and increasing efficiency of mechanical systems. To optimize tribological performance, chemical reactions between a lubricant and a substrate must be designed strategically. Tribochemical reactions are chemical reactions enabled or accelerated by mechanical stimuli. Tribochemically activated lubricant additives play important roles in these reactions. In this review, current understanding in mechanisms of chemical reactions under shear has been discussed. Additives such as oil-soluble organics, ionic liquids (ILs), and nanoparticles (NPs) were analyzed in relation to the tribochemical reaction routes with elements in metallic substrates. The results indicated that phosphorus, sulfur, fluorine, and nitrogen are key elements for tribochemical reactions. The resulting tribofilms from zinc dithiophosphates (ZDDP) and molybdenum dithiocarbamate (MoDTC) have been widely reported, yet that from ILs and NPs need to investigate further. This review serves as a reference for researchers to design and optimize new lubricants. 

/pdf/a-review-of-current-understanding-in-tribochemical-reactions-1hrh5geh.pdf

A review of current understanding in tribochemical reactions involving lubricant additives

Abrasive mechanisms and interfacial mechanics of amorphous silicon carbide thin films in chemical-mechanical planarization

Excessive use of synthetic agrochemicals like fertilizers and pesticides is one of the leading causes of soil quality deterioration and environmental pollution. These fertilizers and pesticides can easily be transferred to the non-target plants and insects, hence reaching, soil and water ecosystem. Nano-formulations, including metal compound-based nanopesticides, nano-fertilizers, nano-emulsions, nano-suspensions, nanogels, size ranging from 10 to 100 nm, have been created for a variety of modes of action and diverse uses in agriculture. Nano-formulations are beneficial in agricultural due to easy and targeted application, controlled release, and need of low effective doses, thus reducing the chances of shift and drift from the application site. Due to the increasing demand for food crops, it is estimated that in coming years the market for nano-fertilizers will grow at a very high rate. Carbon based nano-composites, metal and metal oxide nanoformulations, nano-polymers based composites, silica, and clay mineral-based formulations have been developed for both pesticides and fertilizers. Use of nano-formulations can not only facilitate to improve yield and productivity by increasing nutrient and fertilizer availability, but also shall help to control soil pollution caused by synthetic agrochemicals. They can enhance the efficiency and accuracy of agrochemicals by controlled release of active ingredient and targeted application, which makes them more cost effective and sustainable in comparison to their chemical counterparts. Irrespective of the fact that nano-formulations have tremendous scope for application in agriculture, still their cautious and regulation application is imperative because of their unknown fate and long-term toxicity in the environment. 

Application of nano formulations in agriculture

Continued reduction in feature dimension in integrated circuits demands high degree of flatness after chemical mechanical polishing. Here we report using new yttrium oxide (Y2O3) nanosheets as slurry abrasives for chemical-mechanical planarization (CMP) of copper. Results showed that the global planarization was improved by 30% using a slurry containing Y2O3 nanosheets in comparison with a standard industrial slurry. During CMP, the two-dimensional square shaped Y2O3 nanosheet is believed to induce the low friction, the better rheological performance, and the laminar flow leading to the decrease in the within-wafer-non-uniformity, surface roughness, as well as dishing. The application of the two-dimensional nanosheets as abrasive in CMP would increase the manufacturing yield of integrated circuits.

https://link.springer.com/content/pdf/10.1007%2Fs40544-013-0017-z.pdf

Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper

Magnetism is a promising external intervention for gas sensitivity based on a heterogeneous interfacial structure caused by the regulation of the heterogeneous interface conductivity and the surface oxygen adsorption. In this study, Cu2O/NiO heterostructure-ordered nanoarrays were prepared with a two-dimensional (2D) electrodeposition in situ assembly method for H2S gas detection at room temperature under the action of a magnetic field. The nanoarrays were multibarrier structures with a strictly periodic structure that was greater than hundreds of microns in size. The experimental data confirmed that the response of 50 ppm of H2S based on the nanoarrays was improved by nearly 61% with a relatively weak magnetic field. Particularly at a low concentration (≤20 ppm), the effect of the magnetic field enhancement on the sensitivity was more obvious. We attributed the enhancement of the gas sensitivity with the magnetic field to the regulation of the Cu2O-NiO interface conductance and the surface oxygen adsorption. This study demonstrated that a magnetic field could significantly enhance the gas sensitivity based on heterostructures. Results of this study provide an important reference for the application of magnetism in gas detection and the design of new gas-sensitive materials.

Magnetic-Field-Enhanced H2S Sensitivity of Cu2O/NiO Heterostructure Ordered Nanoarrays.

A sensitive biosensor based on carbon nanohorn/rhodamine B for toxicity detection of polystyrene microplastics and typical pollutants

Developing a gas sensor for the expedient, rapid, and accurate detection of hydrogen sulfide (H2S) in human exhaled breath at room temperature would offer an opportunity for home-style self-monitoring of some chronic diseases. In this work, Cu2O-carbon nanofiber (CNF) heterojunctions were prepared by a two-dimensional (2D) electrodeposition in-situ assembly method to detect low-concentration H2S gas at room temperature. The heterojunction had a distinct interface, which was confirmed by scanning electron microscopy, transmission electron microscopy and voltammetry tests. The detection limit of the sensor was as low as 5 ppb, and the sensors could directly distinguish the exhaled breath of healthy individuals and simulated patients. We attributed the excellent performances to synergistic effects of the modulation of the heterointerface barrier and the sulfide reaction of Cu2O. Furthermore, the adsorption behaviors of H2S on the surfaces of pure Cu2O and the Cu2O-CNF heterojunction were evaluated using the density functional theory (DFT) based on first principles. The results further confirmed that the formation of the heterostructure enhances the H2S adsorption capacity and electron transfer of the sensitive material. This study is of great significance for the diagnosis and monitoring of diseases with the exhaled H2S biomarker. 

Cu2O-CNF heterojunction for exhaled H2S sensing

2D heterostructure nanoarrays have emerged as a promising sensing material for rapid disease detection applications. In this study, a bio-H2S sensor based on Cu2O/Co3O4 nanoarrays was proposed, the controllable preparation of the nanoarrays being achieved by exploring the experimental parameters of the 2D electrodeposition in situ assembly process. The nanoarrays were designed as a multi-barrier system with strict periodicity and long-range order. Based on the interfacial conductance modulation and vulcanization reaction of Cu2O and Co3O4, the sensor exhibited superior sensitivity, selectivity, and stability to H2S in human blood. In addition, the sensor exhibited a reasonable response to 0.1 μmol L−1 Na2S solution, indicating that it had a low detection limit for practical applications. Moreover, first-principles calculations were performed to study changes in the heterointerface during the sensing process and the mechanism of rapid response of the sensor. This work demonstrated the reliability of Cu2O/Co3O4 nanoarrays applied in portable sensors for the rapid detection of bio-H2S.

/pdf/cu2o-co3o4-nanoarrays-for-rapid-quantitative-analysis-of-1chz1wp9.pdf

Cu2O/Co3O4 nanoarrays for rapid quantitative analysis of hydrogen sulfide in blood

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