/pdf/micro-total-analysis-systems-1-introduction-theory-and-27f7corp18.pdf

Micro Total Analysis Systems. 1. Introduction, Theory, and Technology

We survey progress over the past 25 years in the development of microscale devices for pumping fluids. We attempt to provide both a reference for micropump researchers and a resource for those outside the field who wish to identify the best micropump for a particular application. Reciprocating displacement micropumps have been the subject of extensive research in both academia and the private sector and have been produced with a wide range of actuators, valve configurations and materials. Aperiodic displacement micropumps based on mechanisms such as localized phase change have been shown to be suitable for specialized applications. Electroosmotic micropumps exhibit favorable scaling and are promising for a variety of applications requiring high flow rates and pressures. Dynamic micropumps based on electrohydrodynamic and magnetohydrodynamic effects have also been developed. Much progress has been made, but with micropumps suitable for important applications still not available, this remains a fertile area for future research.

https://microfluidics.stanford.edu/Publications/Micropumps_Cooling/Laser%20Review%20of%20Micropumps%20in%20JMM.pdf

A review of micropumps

This review gives a brief overview of microvalves, and focuses on the actuation mechanisms and their applications. One of the stumbling blocks for successful miniaturization and commercialization of fully integrated microfluidic systems was the development of reliable microvalves. Applications of the microvalves include flow regulation, on/off switching and sealing of liquids, gases or vacuums. Microvalves have been developed in the form of active or passive microvalves employing mechanical, non-mechanical and external systems. Even though great progress has been made during the last 20 years, there is plenty of room for further improving the performance of existing microvalves.

http://iopscience.iop.org/article/10.1088/0960-1317/16/5/R01/pdf

A review of microvalves

This paper briefly overviews progress on the development of MEMS-based micropumps and their applications in drug delivery and other biomedical applications such as micrototal analysis systems (μTAS) or lab-on-a-chip and point of care testing systems (POCT). The focus of the review is to present key features of micropumps such as actuation methods, working principles, construction, fabrication methods, performance parameters and their medical applications. Micropumps have been categorized as mechanical or non-mechanical based on the method by which actuation energy is obtained to drive fluid flow. The survey attempts to provide a comprehensive reference for researchers working on design and development of MEMS-based micropumps and a source for those outside the field who wish to select the best available micropump for a specific drug delivery or biomedical application. Micropumps for transdermal insulin delivery, artificial sphincter prosthesis, antithrombogenic micropumps for blood transportation, micropump for injection of glucose for diabetes patients and administration of neurotransmitters to neurons and micropumps for chemical and biological sensing have been reported. Various performance parameters such as flow rate, pressure generated and size of the micropump have been compared to facilitate selection of appropriate micropump for a particular application. Electrowetting, electrochemical and ion conductive polymer film (ICPF) actuator micropumps appear to be the most promising ones which provide adequate flow rates at very low applied voltage. Electroosmotic micropumps consume high voltages but exhibit high pressures and are intended for applications where compactness in terms of small size is required along with high-pressure generation. Bimetallic and electrostatic micropumps are smaller in size but exhibit high self-pumping frequency and further research on their design could improve their performance. Micropumps based on piezoelectric actuation require relatively high-applied voltage but exhibit high flow rates and have grown to be the dominant type of micropumps in drug delivery systems and other biomedical applications. Although a lot of progress has been made in micropump research and performance of micropumps has been continuously increasing, there is still a need to incorporate various categories of micropumps in practical drug delivery and biomedical devices and this will continue to provide a substantial stimulus for micropump research and development in future.

https://www.nectec.or.th/mems/download/MEMS-based%20Micropumps%20in%20Drug.pdf

MEMS-based micropumps in drug delivery and biomedical applications

Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. We give an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications

MEMS-Micropumps: A Review

/pdf/a-high-frequency-high-flow-rate-piezoelectrically-driven-3d8gzrcjso.pdf

A High Frequency High Flow Rate Piezoelectrically Driven MEMS Micropump

The paper introduces a novel transducer technology, called the solid-state micro-hydraulic transducer, currently under development at MIT. The new technology is enabled through integration of micromachining technology, piezoelectrics, and microhydraulic concepts. These micro-hydraulic transducers are capable of bi-directional electromechanical energy conversion, i.e., they can operate as both an actuator that supplies high mechanical force in response to electrical input and an energy generator that transduces electrical energy from mechanical energy in the environment. These transducers are capable of transducing energy at very high specific power output in the order of 1 kW/kg, and thus, they have the potential to enable many novel applications. The concept, the design, and the potential applications of the transducers are presented. Present efforts towards the development of these transducers, and the challenges involved therein, are also discussed.

Micro hydraulic transducer technology for actuation and power generation

We are developing a micromachined vacuum pump for portable analytical instruments that is comprised of a mechanical roughing pump integrated with a micro-machined ion pump. The focus of this paper is on the development of the roughing pump. We have fabricated two generations of micromachined displacement vacuum pumps to explore various design options. Through optimization of design and operation, we can now report a pump that achieves 164 torr absolute pressure, which is to our knowledge the lowest measured pressure in a micro-machined vacuum pump operated from atmospheric pressure.

A single-stage micromachined vacuum pump achieving 164 torr absolute pressure

Towards the development of novel class of miniature transducers with very high specific power, a high frequency and high flow rate hydraulic micro-pump with passive check valves was fabricated and tested. The micro-pump features a small piezoelectric (PZT-5H/PZN-PT) cylinder integrated into micromachined silicon and pyrex chips. The piezoelectric cylinder bonded to a thick circular disk serves as the drive element in the pump chamber, and two axisymmetric silicon membranes with hollow annular bosses serve as system check valves. Using silicone oil as the working fluid, the performance of the micro-pump was tested by varying voltages from 0 to 1600 V and frequencies from 1 kHz to 12 kHz. The micro-pump with PZT-5H element achieved a high flow rate of 2.5 ml/min at 1200 V and 4.5 kHz.

Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump

https://iopscience.iop.org/article/10.1088/1361-6463/aba64e/pdf

Theoretical model and analysis of an electromagnetic vibration energy harvester with nonlinear damping and stiffness based on 3D MEMS coils

Handle everyday research tasks with reliable, citation-backed results

Your personal Research Agent to handle research tasks with citation-backed results

Popular Tasks used by Researchers

How can I help with your research?

Meet SciSpace

Get more enhanced response by uploading the PDFs you want me to reference.

No relevant PDFs in your library

SciSpace is the AI research assistant for academics. Run systematic literature reviews on 280M+ papers, and write papers with cited sources. Trusted by 1M+ students, PhDs & researchers.

SciSpace | AI for Research

Analyze PDFs

Code & Manuscripts

Funding & Grants

Literature & Patents

Medical & Clinical Data

Systematic Review

Visualize & Present

Web & Data

Build a Google Scholar-like website for your research.

Build a website

Create charts and images for your research

Create a Chart

Write a paper for submission to a journal

Draft a manuscript

Patent Search

Design eye-catching scientific posters in minutes.

Scientific Poster Generation

Systematic Literature Review

One task is running at the moment. Your messages will be shown right after.

Drag and drop or click here to browse

Loved by <highlight>1 million+</highlight> researchers

Extract a list of specific topics and their sources from unstructured text

Topics

Compare and analyze relevant papers that matches with your search

Papers

Get insights from PDFs and bookmarked papers from your library

My library

Recent searches

Try searching for:

Catch AI-generated content in scholarly and non-scholarly content

{ai} Detector

Ai Writer

Get PDF Summaries, highlighted text explanations 

Chat with PDF

Effortlessly create in-text citations and bibliographies in APA and 2,500 other formats

Citation generator

Get explanations, summaries, and answers on academic papers

Ease up your research workflow with {scispace}'s cohort of exciting AI tools

Elevate your academic writing skills and convey your ideas the way you want

Paraphraser

Explore our range of reading and writing tools

Your file is being prepared and should be ready in a few minutes. If it's a large file, it might take a bit longer. You can close this window, and we'll email you the file when it's done.

You have reached a maximum limit of <strong>{limit}</strong> columns in the table. Remove at least <strong>1</strong> column to add or create another one.

Hanqing Li

Author Tools

Chat about Author