Power consumption is forecast by the International Technology Roadmap of Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor industry. The purpose of this paper is threefold: (1) to provide an overview of strategies for powering MEMS via non-regenerative and regenerative power supplies; (2) to review the fundamentals of piezoelectric energy harvesting, along with recent advancements, and (3) to discuss future trends and applications for piezoelectric energy harvesting technology. The paper concludes with a discussion of research needs that are critical for the enhancement of piezoelectric energy harvesting devices.

/pdf/powering-mems-portable-devices-a-review-of-non-regenerative-30r5zxggdp.pdf

Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

Microscale combustion: Technology development and fundamental research

Development of micro power generators – A review

A review of research and development on micro and mesoscale combustion is presented, with an emphasis on fundamental understandings achieved in the field during the last decade. Due to its small scale nature, increasing effects of flame–wall interaction and molecular diffusion are the characteristic features of micro and mesoscale combustion. After brief review of device developments, overview of fundamentals in micro and mesoscale combustion as well as possible future directions is presented.

Micro and mesoscale combustion

Fast depleting reserves of conventional energy sources has resulted in an urgent need for increasing energy conversion efficiencies and recycling of waste heat. One of the potential candidates for fulfilling these requirements is thermophotovoltaic (TPV) devices. TPV devices generate electricity from either the complete combustion of different fuels or the waste heat of other energy sources, thereby saving energy. The thermal radiation from the emitter is incident on a TPV cell, which generates electrical currents. Applications of such devices range from hybrid electric vehicles to power sources for microelectronic systems. Absence of any moving parts and versatile fuel usage has made TPV devices very appealing for military and space applications. However, the presently available TPV systems suffer from low conversion efficiency. A viable solution to increase their efficiency is to apply microscale radiation principles in the design of different components to utilize the characteristics of thermal radiation at small distances and in microstructures. In order to have a clear understanding of microscale radiation and its role in TPV devices, several critical issues are reviewed in the present work. Emphasis is given to the development of wavelength-selective emitters and filters and the aspects of microscale heat transfer as applied to TPV systems. Recent progress, along with challenges and opportunities for future development of TPV systems are also outlined. Copyright © 2006 John Wiley & Sons, Ltd.

Microscale radiation in thermophotovoltaic devices- : A review

A power microelectromechanical concept, a microthermophotovoltaic system, is described in this work. The system uses hydrogen as fuel and is capable of delivering 4.5 W of electrical power to a microcombustor 0.1 cm3 in volume. It does not involve any moving parts. Its fabrication and assembly are relatively easy. As a result, it can be more commonly used in commercial electronics and microdevices.

Development of microthermophotovoltaic system

A prototype microthermophotovoltaic (micro-TPV) power generator is described in this letter. The system is made of a SiC (silicon carbide) emitter, a simple nine-layer dielectric filter, and a GaSb (gallium antimony) photovoltaic cell array. In a microcombustor of 0.113 cm3 in volume, when the flow rate of hydrogen is 4.20 g/h, the micro-TPV system is able to deliver an electrical power output of 1.02 W, corresponding to an open-circuit electrical voltage of 2.28 V and a short-circuit current of 0.59 A. The prototype of the micro-TPV system will make it possible for us to substitute batteries with micropower generators in micromechanical devices in the near future.

A prototype microthermophotovoltaic power generator

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Development of microthermophotovoltaic system

A prototype microthermophotovoltaic power generator