Pb(Zr-x, Ti1-x)O-3 (PZT) piezoelectric thin films are of major interest in MEMS technology for their ability to provide electro-mechanical coupling. In this work, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was investigated as a function of composition, film texture and film thickness. Dense, textured and crack-free PZT films have been obtained on silicon substrates up to a thickness of 4 mum. Crystallization anneals have been performed for every 0.25 mum. Nucleation on the previous perovskite layer combined with directional growth leads to a gradient of the compositional parameter x of +/-20% (at x = 0.53 average composition). Best properties have been achieved with {100}-textured film of x = 0.53 composition. Large remanent e(31,f) values of -11 to -12 C/m(2) have been obtained in the whole thickness range of 1-4 mum. These values are superior to values of undoped bulk ceramics, but smaller than in current, optimized (doped) bulk PZT. (C) 2003 Elsevier Science B.V. All rights reserved.

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Keywords: hysteresis ; ferroelectric ; piezoelectric Reference LC-CHAPTER-2006-001 Record created on 2006-08-03, modified on 2017-05-10

/pdf/hysteresis-in-piezoelectric-and-ferroelectric-materials-2cpzvj201f.pdf

Hysteresis in Piezoelectric and Ferroelectric Materials

An equivalent circuit method describing the free stator of piezoelectric motor is presented in this paper, while the circuit elements have complex values. The mechanical, dielectric and piezoelectric losses associated with the vibrator are accounted for by the imaginary components of the circuit elements. It is shown that the calculation of the circuit parameters from the complex elastic, dielectric and piezoelectric material constants is straightforward and the model accuracy is verified with simulation around the important frequencies suitable for motor controller design purposes

Proceedings of the 13th Mediterranean Conference on Control and Automation

The parameters of the KLM and Mason's equivalent circuits in the thickness mode are presented to include dielectric, elastic and piezoelectric loss. The models are compared under various boundary conditions with and without acoustic layers to the analytical solutions of the wave equation. We show that in all cases equivalence is found between the analytical solution and the KLM and Mason's equivalent circuit models. It is noted that in order to maintain consistency with the linear equations of piezoelectricity and the wave equation care is required when applying complex coefficients to the models. The effect of the piezoelectric loss component on the power dissipated in the transducer is presented for loaded and unloaded transducers to determine the significance of the piezoelectric loss to transducer designers. The effect of the piezoelectric loss on the insertion loss was found to be small.

Comparison of the Mason and KLM equivalent circuits for piezoelectric resonators in the thickness mode

We have used resonance methods to determine the variation of all the independent piezoelectric, elastic, and dielectric material coefficients, as well as the corresponding electromechanical coupling factors, of soft and hard doped piezoelectric lead zirconate titanate (PZT) ceramics with compositions near the morphotropic phase boundary, as a function of temperature ranging between −165 and 195°C. The material coefficients were obtained by analyzing the fundamental resonance of the impedance or admittance spectra as a function of frequency for several sample resonance geometries. The piezoelectric coefficients d33, −d31, and d15, as well as the dielectric permittivity coefficients e11T and e33T, generally increased with temperature for both soft and hard PZT samples. However, the elastic compliance coefficients s11E, −s12E, s33E, and s55E exhibited abnormal variations seen as broad peaks over parts of the tested temperature range. Additionally, thermal hystereses were observed in all the studied material ...

Temperature dependence of the complete material coefficients matrix of soft and hard doped piezoelectric lead zirconate titanate ceramics

An equivalent circuit model for the unloaded piezoelectric vibrator in the thickness mode is presented. The model contains two branches, the motional branch and the static branch, like the lossless resonator model, but the circuit elements are generalized by making each a complex constant. The mechanical, dielectric and piezoelectric losses associated with the vibrator are accounted for by the imaginary components of the circuit elements. The model produced impedance curves that closely matched the impedance calculated by using equations derived from vibration theory and the data measured for lead zirconate titanate and PVDF - TRFE co-polymer samples. The calculation of the circuit parameters from the complex elastic, dielectric and piezoelectric material constants is straightforward and the model accurately fits both the baseline dielectric behaviour and the piezoelectric resonance around and below the fundamental resonance. Conversely, when the complex circuit parameters are known, the complex material constants can be derived by straightforward calculations without any loss of information.

https://iopscience.iop.org/article/10.1088/0022-3727/30/16/014/pdf

An accurate equivalent circuit for the unloaded piezoelectric vibrator in the thickness mode

We describe a new method for determining the real and imaginary parts of the material constants of piezoelectric resonators. Our method is applicable to any of the common resonator geometries, it is non-iterative and its accuracy is comparable to that of other methods which are currently in use.

PdP135. Nun-iterative evaluation of the real and imaginary material constants of piezoelectric resonators

The standard IEEE procedure for determining the piezoelectric, dielectric, and elastic constants associated with the radial mode resonance of piezoelectric materials treats these constants as real rather than complex quantities. This approach is valid in the case of piezoelectric materials with low losses such as Lead Zirconate Titanate. However new lossy materials, such as ceramic-polymer composites, are becoming important to transducer designers. For such materials the losses can be taken into account by treating the constants as complex quantities. This paper presents a method to determine the complex form of the above constants. These constants are calculated from the experimental values of the first and second series resonance frequencies, the first parallel resonance frequency and appropriate half band frequencies and the low frequency admittance of the material, all of which can be measured on one disk sample. The method has also been used to automate the IEEE procedure for determining the...

Accurate evaluation of the real and imaginary material constants for a piezoelectric resonator in the radial mode

Equivalent circuit models for unloaded piezoelectric vibrators are presented. The new circuit model includes terms which take into account the dielectric and piezoelectric loss as well as the mechanical loss found in the standard Van Dyke's model. The new model contains two branches, the motional branch and the static branch, like the Van Dyke's model. However there is no resistance element in the motional branch and the losses (mechanical, dielectric, piezoelectric) associated with the vibrator are represented as imaginary components of the remaining circuit elements (C/sub 0/, C/sub 1/, L/sub 1/). The model produced impedance curves that very closely matched the impedance calculated by using the equation derived from vibration theory and data from lead zirconate titanate and PVDF copolymer samples. The calculation of the circuit parameters C/sub 0/, C/sub 1/, and L/sub 1/ from the complex elastic, dielectric and piezoelectric material constants is straightforward and the model accurately represents the impedance spectra about the fundamental resonance even when the mechanical Q of the resonator is as low as 2. Conversely, If the circuit parameters are known, the material constants including losses can be derived by straightforward calculations without the loss of any information.

Accurate equivalent circuits for unloaded piezoelectric resonators

The time dependence of PZT (lead zirconate titanate) (Navy I and III) was investigated in the case of a high stress applied parallel to the poling axis. The time dependence was found to be linear in ln(t), with slope activated in temperature with an activation energy of 0.29-0.32 eV for the Navy I material and 0.62-0.80 eV for the Navy III material. The slope was also found to be linear in stress. It is postulated that this time dependence is due to reorientation of the 90 degrees domains in the sample. >

Domain wall motion in piezoelectric materials under high stress

Handle everyday research tasks with reliable, citation-backed results

Your personal Research Agent to handle research tasks with citation-backed results

Popular Tasks used by Researchers

How can I help with your research?

Meet SciSpace

Get more enhanced response by uploading the PDFs you want me to reference.

No relevant PDFs in your library

SciSpace is the AI research assistant for academics. Run systematic literature reviews on 280M+ papers, and write papers with cited sources. Trusted by 1M+ students, PhDs & researchers.

SciSpace | AI for Research

Analyze PDFs

Code & Manuscripts

Funding & Grants

Literature & Patents

Medical & Clinical Data

Systematic Review

Visualize & Present

Web & Data

Build a Google Scholar-like website for your research.

Build a website

Create charts and images for your research

Create a Chart

Write a paper for submission to a journal

Draft a manuscript

Patent Search

Design eye-catching scientific posters in minutes.

Scientific Poster Generation

Systematic Literature Review

One task is running at the moment. Your messages will be shown right after.

Drag and drop or click here to browse

Loved by <highlight>1 million+</highlight> researchers

Extract a list of specific topics and their sources from unstructured text

Topics

Compare and analyze relevant papers that matches with your search

Papers

Get insights from PDFs and bookmarked papers from your library

My library

Recent searches

Try searching for:

Catch AI-generated content in scholarly and non-scholarly content

{ai} Detector

Ai Writer

Get PDF Summaries, highlighted text explanations 

Chat with PDF

Effortlessly create in-text citations and bibliographies in APA and 2,500 other formats

Citation generator

Get explanations, summaries, and answers on academic papers

Ease up your research workflow with {scispace}'s cohort of exciting AI tools

Elevate your academic writing skills and convey your ideas the way you want

Paraphraser

Explore our range of reading and writing tools

Your file is being prepared and should be ready in a few minutes. If it's a large file, it might take a bit longer. You can close this window, and we'll email you the file when it's done.

You have reached a maximum limit of <strong>{limit}</strong> columns in the table. Remove at least <strong>1</strong> column to add or create another one.

H. D. Wiederick

Author Tools

Chat about Author